发明授权
- 专利标题: Apparatus for producing single crystal
- 专利标题(中): 单晶制造装置
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申请号: US759224申请日: 1996-12-05
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公开(公告)号: US5900058A公开(公告)日: 1999-05-04
- 发明人: Kouji Mizuishi , Atsushi Iwasaki
- 申请人: Kouji Mizuishi , Atsushi Iwasaki
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-350039 19951225
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B29/06 ; C30B35/00
摘要:
An apparatus for producing a single crystal by the Czochralski method is disclosed in which an exhaust system is provided with a water sealing bubbler. On the upstream side of the bubbler is provided a buffer or a vacuum breaker or a buffer and a vacuum breaker. The structure prevents the sealing water in the bubbler from flowing backward, so that danger of steam explosion can be avoided.
公开/授权文献
- USD307361S Glider 公开/授权日:1990-04-24
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