发明授权
- 专利标题: Methods of etching articles via microcontact printing
- 专利标题(中): 通过微接触印刷蚀刻制品的方法
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申请号: US677309申请日: 1996-07-09
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公开(公告)号: US5900160A公开(公告)日: 1999-05-04
- 发明人: George M. Whitesides , Younan Xia , James L. Wilbur , Rebecca J. Jackman , Enoch Kim , Mara G. Prentiss , Milan Mrksich , Amit Kumar , Christopher B. Gorman , Hans Biebuyck , Karl K. Berggren
- 申请人: George M. Whitesides , Younan Xia , James L. Wilbur , Rebecca J. Jackman , Enoch Kim , Mara G. Prentiss , Milan Mrksich , Amit Kumar , Christopher B. Gorman , Hans Biebuyck , Karl K. Berggren
- 申请人地址: MA Cambridge
- 专利权人: President and fellows of Harvard College
- 当前专利权人: President and fellows of Harvard College
- 当前专利权人地址: MA Cambridge
- 主分类号: B01L3/00
- IPC分类号: B01L3/00 ; B05D1/28 ; C40B60/14 ; G02B5/18 ; G02B6/12 ; G02B6/124 ; G02B6/136 ; G02B6/36 ; G03F7/00 ; G03F7/16 ; H01L21/48 ; H01L21/768 ; B44C1/22
摘要:
Improved methods of forming a patterned self-assembled monolayer on a surface and derivative articles are provided. According to one method, an elastomeric stamp is deformed during and/or prior to using the stamp to print a self-assembled molecular monolayer on a surface. According to another method, during monolayer printing the surface is contacted with a liquid that is immiscible with the molecular monolayer-forming species to effect controlled reactive spreading of the monolayer on the surface. Methods of printing self-assembled molecular monolayers on nonplanar surfaces and derivative articles are provided, as are methods of etching surfaces patterned with self-assembled monolayers, including methods of etching silicon. Optical elements including flexible diffraction gratings, mirrors, and lenses are provided, as are methods for forming optical devices and other articles using lithographic molding. A method for controlling the shape of a liquid on the surface of an article is provided, involving applying the liquid to a self-assembled monolayer on the surface, and controlling the electrical potential of the surface.
公开/授权文献
- US5157972A Pressure sensor with high modules support 公开/授权日:1992-10-27
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