Elastomeric mask and use in fabrication of devices
    10.
    发明授权
    Elastomeric mask and use in fabrication of devices 有权
    弹性面膜和用于制造器件

    公开(公告)号:US07282240B1

    公开(公告)日:2007-10-16

    申请号:US09694074

    申请日:2000-10-20

    IPC分类号: B05D1/32

    摘要: An elastomeric mask is provided that allows deposition of a variety of materials through mask openings. The mask seals effectively against substrate surfaces, allowing simple deposition from fluid phase, gas phase, and the like or removal of material using gaseous or liquid etchants. The mask then can be simply peeled from the surface of the substrate leaving the patterned material behind. Multi-layered mask techniques are described in which openings in an upper mask allow selected openings of a lower mask to remain un-shielded, while other openings of the lower mask are shielded. A first deposition step, following by re-orientation of the upper mask to expose a different set of lower mask openings, allows selective deposition of different materials in different openings of the lower mask. Pixelated organic electroluminescent devices are provided via the described technique.

    摘要翻译: 提供了一种弹性体掩模,其允许通过掩模开口沉积各种材料。 掩模有效地密封衬底表面,允许从流体相,气相等简单沉积或使用气体或液体蚀刻剂去除材料。 然后可以从掩模的表面简单地剥离掩模,留下图案化材料。 描述了多层掩模技术,其中上掩模中的开口允许下掩模的选定开口保持未屏蔽,而下掩模的其它开口被屏蔽。 第一沉积步骤,随后通过上掩模的重新定向以暴露不同的一组下掩模开口,允许不同材料在下掩模的不同开口中的选择性沉积。 通过所述技术提供像素化的有机电致发光器件。