Invention Grant
US5906102A Cryopump with gas heated exhaust valve and method of warming surfaces of
an exhaust valve
失效
带燃气加热排气阀的冷冻库和排气阀表面加热方法
- Patent Title: Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve
- Patent Title (中): 带燃气加热排气阀的冷冻库和排气阀表面加热方法
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Application No.: US631532Application Date: 1996-04-12
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Publication No.: US5906102APublication Date: 1999-05-25
- Inventor: Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
- Applicant: Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
- Applicant Address: MA Mansfield
- Assignee: Helix Technology Corporation
- Current Assignee: Helix Technology Corporation
- Current Assignee Address: MA Mansfield
- Main IPC: F04B37/08
- IPC: F04B37/08 ; B01D8/00
Abstract:
A cryopump having a cryopump chamber includes a purge gas valve coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve couples the cryopump chamber to a roughing pump enabling the cryopump chamber to be roughed. An exhaust valve is coupled to the cryopump chamber for exhausting gases from the cryopump chamber during purge. A delivery valve is coupled to the exhaust valve for delivering a second quantity of warm gas directly onto surfaces of the exhaust valve for warming the surfaces of the exhaust valve.
Public/Granted literature
- US5133781A Compatibilization of asphaltenes in bituminous liquids using bulk phosphoalkoxylation Public/Granted day:1992-07-28
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