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US5908682A Ceramic member having fine throughholes 失效
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Ceramic member having fine throughholes
摘要:
Unitarily sintered ceramic member having fine throughholes. unitarily sintered material. The ceramic member has a ceramic substrate having at least one window and a thin ceramic plate laminated onto the substrate so as to cover the window, wherein the thin ceramic plate has a plurality of fine throughholes at the portion(s) corresponding to the at least one window and each hole-to-hole distance is 70 .mu.m or less. This ceramic member having fine throughholes is made of a material of heat resistance, abrasion resistance and low thermal expansion and satisfies the requirements of high density, high precision and increased reliability to be possessed by such apparatuses as encoders, high-precision fine electric field shutters, ion current-controlling heads, scales and the like.
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