Process for production of ceramic member having fine throughholes
    2.
    发明授权
    Process for production of ceramic member having fine throughholes 失效
    具有细孔的陶瓷构件的制造方法

    公开(公告)号:US5728244A

    公开(公告)日:1998-03-17

    申请号:US649485

    申请日:1996-05-17

    IPC分类号: B28B1/00 C04B35/486 B32B31/26

    摘要: A process for producing a ceramic member having fine throughholes, includes a step of preparing a first green sheet for a thin ceramic plate, a step of forming, in the first green sheet, a plurality of fine throughholes so that the hole-to-hole distance after sintering becomes 70 .mu.m or less, a step of preparing a second green sheet for a ceramic substrate, a step of forming at least one window in the second green sheet, a step of laminating the first green sheet having a plurality of fine throughholes, on the second green sheet having at least one window so that the plurality of fine throughholes correspond to the at least one window, to form a unitary laminate, and a step of sintering the laminate to produce a unitarily sintered material as a ceramic member having fine throughholes. Alternatively, the throughholes can be formed after the first and second sheets are laminated.

    摘要翻译: 一种制造具有细孔的陶瓷构件的方法包括制备用于薄陶瓷板的第一生片的步骤,在第一生片中形成多个细通孔的步骤,使得孔对孔 烧结后的距离为70μm以下,制作陶瓷基板的第二生片的步骤,在第二生片中形成至少一个窗的步骤,将具有多个微细的第一生片层合的工序 通孔,在具有至少一个窗口的第二生片上,使得多个细通孔对应于至少一个窗口,以形成整体层压体;以及烧结层压体以制备作为陶瓷构件的整体烧结材料的步骤 具有良好的通孔。 或者,可以在第一和第二片层压之后形成通孔。

    Fluid sensor
    3.
    发明授权
    Fluid sensor 失效
    流体传感器

    公开(公告)号:US5877411A

    公开(公告)日:1999-03-02

    申请号:US857337

    申请日:1997-05-16

    摘要: A fluid sensor includes a base body 2 having a vibrating portion 7, a piezoelectric element 3 which is fixed onto one surface of the vibrating portion 7 and has a piezoelectric film 4 and at least a pair of electrodes 5a, 5b which are disposed in contact with the piezoelectric film 4, an electrode terminal 6 which is disposed on the surface of the base body 2 and electrically connected to the pair of electrodes 5a, 5b, a coating material 8 which is disposed on the surface of the base body 2 in the periphery of the electrode terminal 6; pressure plates 14a, 14b, and a sealing member 12 which is held between the base body 2 and the pressure plates 14a, 14b and formed so as to surround the electrode terminal 6, wherein the electrode terminal 6 is held gas-tightly and/or liquid-tightly with respect to a fluid to be measured by holding the sealing member 12 between the coating material 8 and the pressure plates 14a, 14b.

    摘要翻译: 流体传感器包括具有振动部分7的基体2,固定在振动部分7的一个表面上的压电元件3,并且具有压电薄膜4和至少一对电极5a,5b 与压电薄膜4同样地设置有电极端子6,该电极端子6设置在基体2的表面并与该对电极5a,5b电连接,涂覆材料8设置在基体2的表面上 电极端子6的周边; 压板14a,14b和保持在基体2和压板14a,14b之间并形成为围绕电极端子6的密封构件12,其中电极端子6气密地保持和/或 通过将密封构件12保持在涂覆材料8和压力板14a,14b之间,相对于要测量的流体液密。

    Ceramic member having fine throughholes
    4.
    发明授权
    Ceramic member having fine throughholes 失效
    具有细孔的陶瓷构件

    公开(公告)号:US5908682A

    公开(公告)日:1999-06-01

    申请号:US960088

    申请日:1997-10-24

    摘要: Unitarily sintered ceramic member having fine throughholes. unitarily sintered material. The ceramic member has a ceramic substrate having at least one window and a thin ceramic plate laminated onto the substrate so as to cover the window, wherein the thin ceramic plate has a plurality of fine throughholes at the portion(s) corresponding to the at least one window and each hole-to-hole distance is 70 .mu.m or less. This ceramic member having fine throughholes is made of a material of heat resistance, abrasion resistance and low thermal expansion and satisfies the requirements of high density, high precision and increased reliability to be possessed by such apparatuses as encoders, high-precision fine electric field shutters, ion current-controlling heads, scales and the like.

    摘要翻译: 具有细孔的一体烧结陶瓷构件。 一体烧结材料。 陶瓷构件具有陶瓷基板,该陶瓷基板具有层叠在基板上的至少一个窗口和薄陶瓷板以覆盖该窗口,其中该薄陶瓷板在至少对应于该部分的部分具有多个细小通孔 一个窗口和每个孔对孔距离为70μm或更小。 这种具有细孔的陶瓷构件由耐热性,耐磨性和低热膨胀性的材料制成,并且满足诸如编码器,高精度精细电场快门等装置所要求的高密度,高精度和高可靠性的要求 离子电流控制头,秤等。