发明授权
US5909199A Plasma driving circuit 失效
等离子驱动电路

Plasma driving circuit
摘要:
A plasma driving circuit for sequentially discharging and driving a plurality of plasma channels. The circuit comprises a plurality of complementary switches provided correspondingly to the plasma channels; a constant current source connected in common to each of the complementary switches and supplying a predetermined discharge current thereto; a scanner for sequentially controlling the on/off actions of the complementary switches and distributing the discharge current to the corresponding plasma channels; and a suppressing circuitry included in the output stage of each of the complementary switches and serving to suppress the output of a rush current which results from a capacitive component existent in each of the complementary switches. The suppressing means is a diode element having a capacitive component sufficiently smaller than the capacitive component existent in each complementary switch, and a resistance element is connected in series to the diode element. The resistance value of the resistance element is so optimized as not to limit the discharge current substantially but to be adapted for suppressing the rush current effectively.
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