发明授权
- 专利标题: Microwave plasma element sensor
- 专利标题(中): 微波等离子元件传感器
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申请号: US40190申请日: 1998-02-13
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公开(公告)号: US5909277A公开(公告)日: 1999-06-01
- 发明人: Paul Woskov , Kamal Hadidi , Paul Thomas
- 申请人: Paul Woskov , Kamal Hadidi , Paul Thomas
- 申请人地址: MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: MA Cambridge
- 主分类号: G01N21/73
- IPC分类号: G01N21/73
摘要:
The apparatus for analyzing a sample gas includes a source of microwave energy directed onto the sample gas to create a plasma. A spectrometer is arranged to receive light from the plasma to identify different elements and/or to determine the concentration of at least one element in the sample gas. In one embodiment, an attached calibration system is provided for calibrating the output of the spectrometer. The calibration system includes a nebulizer apparatus for introducing a controlled amount of at least one element into the sample gas. The apparatus also includes structure adapted to add a swirl component to the plasma gas flow as an aid to plasma confinement. It is also preferred that a pair of electrodes contacting the sample gas be provided for igniting the plasma.
公开/授权文献
- USD373321S Bell 公开/授权日:1996-09-03
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