Invention Grant
- Patent Title: Apparatus for and method of polishing workpiece
- Patent Title (中): 抛光工件的设备及方法
-
Application No.: US728069Application Date: 1996-10-09
-
Publication No.: US5916412APublication Date: 1999-06-29
- Inventor: Masamichi Nakashiba , Norio Kimura , Isamu Watanabe , Yoko Hasegawa
- Applicant: Masamichi Nakashiba , Norio Kimura , Isamu Watanabe , Yoko Hasegawa
- Applicant Address: JPX Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JPX Tokyo
- Priority: JPX8-054055 19960216; JPX8-171735 19960611
- Main IPC: B24B37/30
- IPC: B24B37/30 ; B24B37/32 ; H01L21/306
Abstract:
A polishing apparatus for polishing a workpiece such as a semiconductor wafer has a turntable with an abrasive cloth mounted on an upper surface thereof, and a top ring for holding a workpiece and pressing the workpiece against the abrasive cloth under a first pressing force to polish the workpiece. The top ring has a recess defined therein for accommodating the workpiece therein. A presser ring is vertically movably disposed around the top ring, and pressed against the abrasive cloth under a variable second pressing force. The first and second pressing forces are variable independently of each other, and the second pressing force is determined based on the first pressing force.
Public/Granted literature
- USD339574S Flat front CRT display Public/Granted day:1993-09-21
Information query