发明授权
- 专利标题: Thin film magnetic head and method of manufacturing the same and magnetic memory apparatus
- 专利标题(中): 薄膜磁头及其制造方法及磁记忆装置
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申请号: US684421申请日: 1996-07-19
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公开(公告)号: US5917681A公开(公告)日: 1999-06-29
- 发明人: Mithumasa Okada , Takamitsu Orimoto , Keita Ohtsuka
- 申请人: Mithumasa Okada , Takamitsu Orimoto , Keita Ohtsuka
- 申请人地址: JPX Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX7-282138 19951030
- 主分类号: G11B5/31
- IPC分类号: G11B5/31 ; G11B5/39 ; G11B5/40 ; G11B5/455 ; G11B5/33
摘要:
According to a method of manufacturing a thin film magnetic head, a magnetoresistive device and an alumina layer are formed on a substrate, then the alumina layer is covered with a covering layer made of metal such as Ti having a thickness of more than 10 nm, then a photoresist film is formed on the covering layer, and then an opening is formed by exposing and developing the photoresist film. In turn, a magnetic metal film is formed on an allover surface, then the photoresist film and the magnetic metal film thereon are removed. The thin film magnetic head structured as above may provide a good magnetic characteristic since it has the covering layer on the alumina layer to prevent the alumina layer from being corroded by liquid developer. In addition, a magnetic recording unit employing the thin film magnetic head may reproduce data recorded with high density.
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