公开(公告)号：US5917681A

公开(公告)日：1999-06-29

申请号：US684421

申请日：1996-07-19

申请人： Mithumasa Okada ,  Takamitsu Orimoto ,  Keita Ohtsuka

发明人： Mithumasa Okada ,  Takamitsu Orimoto ,  Keita Ohtsuka

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/40 ,  G11B5/455 ,  G11B5/33

CPC分类号： G11B5/3906 ,  G11B5/3967 ,  G11B5/3133 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/40 ,  G11B5/455 ,  Y10T428/254 ,  Y10T428/256

摘要： According to a method of manufacturing a thin film magnetic head, a magnetoresistive device and an alumina layer are formed on a substrate, then the alumina layer is covered with a covering layer made of metal such as Ti having a thickness of more than 10 nm, then a photoresist film is formed on the covering layer, and then an opening is formed by exposing and developing the photoresist film. In turn, a magnetic metal film is formed on an allover surface, then the photoresist film and the magnetic metal film thereon are removed. The thin film magnetic head structured as above may provide a good magnetic characteristic since it has the covering layer on the alumina layer to prevent the alumina layer from being corroded by liquid developer. In addition, a magnetic recording unit employing the thin film magnetic head may reproduce data recorded with high density.

摘要翻译： 根据制造薄膜磁头的方法，在基板上形成磁阻装置和氧化铝层，然后用厚度大于10nm的Ti等金属制的覆盖层覆盖氧化铝层， 然后在覆盖层上形成光致抗蚀剂膜，然后通过曝光和显影光致抗蚀剂膜形成开口。 反过来，在整个表面上形成磁性金属膜，然后除去其上的光致抗蚀剂膜和磁性金属膜。 由上述构成的薄膜磁头可以提供良好的磁特性，因为它具有在氧化铝层上的覆盖层，以防止氧化铝层被液体显影剂腐蚀。 此外，采用薄膜磁头的磁记录单元可以再现以高密度记录的数据。