发明授权
- 专利标题: Method of making asymmetric nonvolatile memory cell
- 专利标题(中): 制作非对称非易失性存储单元的方法
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申请号: US712373申请日: 1996-09-11
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公开(公告)号: US5920776A公开(公告)日: 1999-07-06
- 发明人: Lorenzo Fratin , Leonardo Ravazzi , Carlo Riva
- 申请人: Lorenzo Fratin , Leonardo Ravazzi , Carlo Riva
- 申请人地址: ITX Agrate Brianza
- 专利权人: SGS-Thomson Microelectronics, S.r.l.
- 当前专利权人: SGS-Thomson Microelectronics, S.r.l.
- 当前专利权人地址: ITX Agrate Brianza
- 优先权: EPX9483036 19940718
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L21/336 ; H01L27/115 ; H01L29/10 ; H01L29/788 ; H01L29/792
摘要:
A nonvolatile memory having a cell comprising an N.sup.+ type source region and drain region embedded in a P.sup.- type substrate and surrounded by respective P-pockets. The drain and source P-pockets are formed in two different high-angle boron implantation steps designed to optimize implantation energy and dosage for ensuring scalability of the cell and avoiding impairment of the snap-back voltage. The resulting cell also presents a higher breakdown voltage as compared with known cells.
公开/授权文献
- US5107923A Flow distribution device 公开/授权日:1992-04-28
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