发明授权
US5923696A Visible light emitting vertical cavity surface emitting laser with gallium phosphide contact layer and method of fabrication 失效
可见光发射垂直腔表面发射激光器与磷化镓接触层及其制造方法

Visible light emitting vertical cavity surface emitting laser with
gallium phosphide contact layer and method of fabrication
摘要:
A stack of distributed Bragg reflectors is disposed on the surface of a semiconductor substrate. The stack includes a plurality of alternating layers of material having alternating refractive indexes with the stack having a first dopant type. A first cladding region is disposed on the stack with an active area disposed on the first cladding region. The active area includes at least two barrier layers and a quantum well layer. A second cladding region is disposed on the active area with a stack of distributed Bragg reflectors disposed on the cladding region. A contact region is disposed on the second stack of distributed Bragg reflectors. The contact region includes a magnesium doped gallium phosphide material.
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