发明授权
- 专利标题: High pulse rate pulse power system
- 专利标题(中): 高脉冲脉冲电源系统
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申请号: US118773申请日: 1998-07-18
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公开(公告)号: US5936988A公开(公告)日: 1999-08-10
- 发明人: William N. Partlo , Daniel L. Birx , Richard M. Ness , Daniel A. Rothweil , Paul C. Melcher , Brett D. Smith
- 申请人: William N. Partlo , Daniel L. Birx , Richard M. Ness , Daniel A. Rothweil , Paul C. Melcher , Brett D. Smith
- 申请人地址: CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: CA San Diego
- 主分类号: H01F30/00
- IPC分类号: H01F30/00 ; G03F7/20 ; H01S3/097 ; H01S3/225 ; H03K3/57 ; H03K17/80 ; H01S3/00
摘要:
A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
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