发明授权
- 专利标题: Infrared bolometer
- 专利标题(中): 红外辐射热量计
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申请号: US203561申请日: 1998-12-02
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公开(公告)号: US5939971A公开(公告)日: 1999-08-17
- 发明人: Yoon-Joong Yong
- 申请人: Yoon-Joong Yong
- 申请人地址: KRX
- 专利权人: Daewoo Electronics Co., Ltd.
- 当前专利权人: Daewoo Electronics Co., Ltd.
- 当前专利权人地址: KRX
- 主分类号: G01J5/20
- IPC分类号: G01J5/20 ; H01L31/08
摘要:
A three-level infrared bolometer including an active matrix level, a support level, posts and an absorption level. The active matrix level includes a substrate having an integrated circuit, connecting terminals and a protective layer covering the substrate. The support level includes bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes an absorber, a bolometer element surrounded by the absorber, a titanium thin film on top of the absorber, and an infrared absorber coating made of silicon oxy-nitride and formed on top of the titanium thin film, the infrared absorber coating having multipores therein and a rough top surface as a result of the titanium film surface not providing enough nucleation sites for it to grow stably. Each of posts includes an electrical conduit surrounded by an insulating material and is placed between the absorption level and the bridge, in such a way that the serpentine bolometer element is electrically connected to the integrated circuit through the electrical conduit, the conduction line and the connecting terminal.
公开/授权文献
- US5499449A Method of manufacturing battery terminals 公开/授权日:1996-03-19
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