公开(公告)号：US06490384B2

公开(公告)日：2002-12-03

申请号：US09824731

申请日：2001-04-04

申请人： Yoon-Joong Yong

发明人： Yoon-Joong Yong

IPC分类号： G02B626

CPC分类号： G02B6/3566 ,  G02B6/3512 ,  G02B6/3516 ,  G02B6/3556 ,  G02B6/3584

摘要： An optical switching system modulates two-directional optical paths of optical signals from fiber to fiber. The optical switching system includes an array of input optical fibers for receiving the optical signals from outside, an array of first deformable mirrors for modulating first-directional optical paths of the optical signals, an array of second deformable mirrors for modulating second-directional optical paths of the optical signals, and an array of output optical fibers for routing the optical signals to outside. Each of the optical signals travels from an input optical fiber to a destined output optical fiber via a first and a second deformable mirror. The optical switching system provides a 2-axes switching capability of the optical signal by utilizing twice one-directional modulator, each being involved for determining one-directional address of the optical signal, which will, in turns, achieve all-switching capability between multiple optical channels from fiber to fiber.

公开(公告)号：US06201244B1

公开(公告)日：2001-03-13

申请号：US09146256

申请日：1998-09-03

申请人： Sang-Baek Ju ,  Yoon-Joong Yong

发明人： Sang-Baek Ju ,  Yoon-Joong Yong

IPC分类号： H01L3109

CPC分类号： G01J5/20

摘要： A three-level infra-red bolometer includes an active matrix level, a support level, a pair of posts and an absorption level. The active matrix level includes a substrate having an integrated circuit, a pair of connecting terminals and a protective layer covering the substrate. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes a serpentine bolometer element surrounded by an absorber made of silicon oxide (SiO2) or silicon oxy-nitride (SiOxNy). Each of the posts includes an electrical conduit surrounded by an insulating material and is placed between the absorption level and the bridge, in such a way that the serpentine bolometer element is electrically connected to the integrated circuit through the electrical conduit, the conduction line and the connecting terminal.

摘要翻译： 三级红外辐射热分析仪包括有源矩阵水平，支持水平，一对柱和吸收水平。 有源矩阵电平包括具有集成电路的基板，一对连接端子和覆盖该基板的保护层。 支撑级包括一对桥，每个桥设置有形成在其顶部的导线，其中导线的一端电连接到相应的连接端子。 吸收水平包括由氧化硅（SiO 2）或氮氧化硅（SiO x N y）制成的吸收体包围的蛇形测辐射热计元件。 每个柱包括由绝缘材料包围并且被放置在吸收水平和桥之间的电导管，使得蛇形测辐射热计元件通过电导线，导线和 连接端子。

公开(公告)号：US5939971A

公开(公告)日：1999-08-17

申请号：US203561

申请日：1998-12-02

申请人： Yoon-Joong Yong

发明人： Yoon-Joong Yong

IPC分类号： G01J5/20 ,  H01L31/08

CPC分类号： G01J5/20

摘要： A three-level infrared bolometer including an active matrix level, a support level, posts and an absorption level. The active matrix level includes a substrate having an integrated circuit, connecting terminals and a protective layer covering the substrate. The support level includes bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes an absorber, a bolometer element surrounded by the absorber, a titanium thin film on top of the absorber, and an infrared absorber coating made of silicon oxy-nitride and formed on top of the titanium thin film, the infrared absorber coating having multipores therein and a rough top surface as a result of the titanium film surface not providing enough nucleation sites for it to grow stably. Each of posts includes an electrical conduit surrounded by an insulating material and is placed between the absorption level and the bridge, in such a way that the serpentine bolometer element is electrically connected to the integrated circuit through the electrical conduit, the conduction line and the connecting terminal.

摘要翻译： 包括有源矩阵水平，支撑水平，柱和吸收水平的三级红外测辐射热计。 有源矩阵电平包括具有集成电路的基板，连接端子和覆盖基板的保护层。 支撑级包括桥，每个桥设置有形成在其顶部的导线，其中导线的一端电连接到相应的连接端子。 吸收水平包括吸收器，由吸收器包围的测辐射热计元件，吸收器顶部的钛薄膜和形成在氧化钛上的红外线吸收剂涂层，形成在钛薄膜的顶部，红外线吸收剂涂层 由于钛膜表面没有提供足够的成核位点以使其稳定生长，因此具有多孔和粗糙的顶表面。 每个柱包括由绝缘材料围绕并且被设置在吸收水平和桥之间的电导体，使得蛇形测辐射热计元件通过电导体，导电线和连接电连接到集成电路 终奌站。

公开(公告)号：US6094127A

公开(公告)日：2000-07-25

申请号：US207048

申请日：1998-12-08

申请人： Yoon-Joong Yong

发明人： Yoon-Joong Yong

IPC分类号： G01J5/20 ,  H01L31/08

CPC分类号： G01J5/20

摘要： The inventive three-level infrared bolometer includes an active matrix level, a support level, a pair of post and a absorption level. The active matrix level includes a substrate having an integrated circuit, a pair of connecting terminal and a protective layer covering the substrate. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes a serpentine bolometer element surrounded by an absorber, and an infrared absorber coating formed on the absorber and having a rough surface. Each of posts includes an electrical conduit surrounded by an insulating material and is placed between the absorption level and the bridge, in such a way that the serpentine bolometer element is electrically connected to the integrated circuit through the electrical conduit, the conduction line and the connecting terminal.

摘要翻译： 本发明的三级红外测辐射热计包括有源矩阵水平，支撑水平，一对柱和吸收水平。 有源矩阵电平包括具有集成电路的衬底，一对连接端子和覆盖衬底的保护层。 支撑级包括一对桥，每个桥设置有形成在其顶部的导线，其中导线的一端电连接到相应的连接端子。 吸收水平包括由吸收体围绕的蛇形测辐射热计元件，以及形成在吸收体上并具有粗糙表面的红外线吸收剂涂层。 每个柱包括由绝缘材料围绕并且被设置在吸收水平和桥之间的电导体，使得蛇形测辐射热计元件通过电导线，导线和连接电连接到集成电路 终奌站。