发明授权
US5948483A Method and apparatus for producing thin film and nanoparticle deposits 失效
用于生产薄膜和纳米颗粒沉积物的方法和装置

Method and apparatus for producing thin film and nanoparticle deposits
摘要:
A method for producing a thin film or nanoparticle deposit includes the step of providing a working liquid, movement of the working liquid at a liquid surface prevented by surface tension. The method also includes the steps of supplying an electric charge having a first polarity to the working liquid at the liquid surface to overcome surface tension at the liquid surface to produce a first plurality of charged nanodrops and directing the first plurality of charged nanodrops against a substrate surface. The method further includes the steps of supplying an electric charge having a second polarity to the working liquid at the liquid surface, the second polarity being opposite to the first polarity, to overcome surface tension at the liquid surface to produce a second plurality of charged nanodrops, and directing the second plurality of charged nanodrops against the substrate surface. The method additionally includes the step of alternating between supplying the electric charge having the first polarity and supplying the electric charge having the second polarity to the working liquid at the liquid surface. An apparatus for producing a thin film or nanoparticle deposit includes an apparatus for supplying a working liquid, surface tension preventing movement of the working liquid from the apparatus for supplying a working fluid at a liquid surface, an apparatus for supplying an electric charge to the working liquid at the liquid surface to overcome the surface tension to produce a stream of nanodrops, and an apparatus for supplying electric charge of alternating polarity to the apparatus for supplying the electric charge to the working liquid at the liquid surface.
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