发明授权
US5949070A Scanning force microscope with integral laser-scanner-cantilever and
independent stationary detector
失效
具有整体激光扫描仪 - 悬臂和独立静态探测器的扫描力显微镜
- 专利标题: Scanning force microscope with integral laser-scanner-cantilever and independent stationary detector
- 专利标题(中): 具有整体激光扫描仪 - 悬臂和独立静态探测器的扫描力显微镜
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申请号: US783416申请日: 1997-01-14
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公开(公告)号: US5949070A公开(公告)日: 1999-09-07
- 发明人: Ronald C. Gamble
- 申请人: Ronald C. Gamble
- 专利权人: Gamble; Ronald C.
- 当前专利权人: Gamble; Ronald C.
- 主分类号: G01Q10/00
- IPC分类号: G01Q10/00 ; G01Q60/04 ; G01B7/34 ; G01Q20/02 ; G01Q30/14 ; G01Q70/02 ; H01J37/352
摘要:
A scanning force microscope is disclosed which includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes a simplified mounting of laser and related adjustments and the locating of a detector independent of the scanner, to improve ease of handling and providing convenient locations for adjustments. In one preferred embodiment of the scanning force microscope, the surface of samples may be imaged while the cantilever portion of the scanner is immersed in liquids without special set-up or special adapters.
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