发明授权
- 专利标题: Radiation sensitive resin composition
- 专利标题(中): 辐射敏感树脂组合物
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申请号: US892200申请日: 1997-07-14
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公开(公告)号: US5952150A公开(公告)日: 1999-09-14
- 发明人: Yoshihisa Ohta , Yong Wang , Takayoshi Tanabe , Shin-ichiro Iwanaga
- 申请人: Yoshihisa Ohta , Yong Wang , Takayoshi Tanabe , Shin-ichiro Iwanaga
- 申请人地址: JPX Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-206360 19960718; JPX9-105403 19970409
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/038 ; G03F7/039 ; G03C1/492
摘要:
A positive-tone or negative-tone radiation sensitive resin composition which allows easy preparation of a resist, exhibits superior storage stability, high sensitivity, and high resolution capability, and is capable of producing excellent resist patterns. The positive-tone type composition comprises (A) a disulfonylmethane derivative in which the main chain with two sulfonyl groups bonded forms a three to eleven member cyclic carbon structure and (B) (a) a resin protected by an acid decomposable group or (b) an alkali-soluble resin and an alkali-solubility control agent. The negative-tone type composition comprises the component (A), (C) an alkali-soluble resin, and (D) a cross-linking agent.
公开/授权文献
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