发明授权
- 专利标题: Substrate carrying apparatus
- 专利标题(中): 基板输送装置
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申请号: US776653申请日: 1997-07-21
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公开(公告)号: US5957651A公开(公告)日: 1999-09-28
- 发明人: Yuji Takebayashi , Tokunobu Akao , Yoshikazu Konno
- 申请人: Yuji Takebayashi , Tokunobu Akao , Yoshikazu Konno
- 申请人地址: JPX Tokyo
- 专利权人: Kokusai Electric Co., Ltd.
- 当前专利权人: Kokusai Electric Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-142128 19950608
- 主分类号: B65G49/07
- IPC分类号: B65G49/07 ; H01L21/677 ; H01L21/68 ; H01L21/687
摘要:
A rotary shaft is supported by a frame so as to be rotatable and movable vertically relative to the frame. A carrying arm is pivoted to the rotary shaft and a substrate receiver is attached to an end of the carrying arm and receives a substrate. A guide base is mounted on the rotary shaft on the lower side of the substrate receiver in such a manner that the guide base is approximately parallel to the substrate receiver, and a substrate alignment mechanism is attached to the rotary shaft via the guide base. The substrate alignment mechanism includes a pair of location correcting members which are coupled to air cylinders. The location correcting members are displaced by air cylinders to correct the location of substrate.
公开/授权文献
- US4632958A NBR/silicate blends 公开/授权日:1986-12-30