公开(公告)号：US20020096507A1

公开(公告)日：2002-07-25

申请号：US10108432

申请日：2002-03-29

申请人： Kokusai Electric Co., Ltd.

发明人： Eisuke Nishitani ,  Katsuhisa Kasanami ,  Naoko Matsuyama ,  Shinya Sasaki

IPC分类号： F27B005/14 ,  F27D011/00

CPC分类号： H01L21/67115 ,  C30B25/105 ,  C30B31/12 ,  H01L21/67109

摘要： Uniformity of temperature is established within a wafer, and a higher throughput is achieved while the wafer heating time is dramatically reduced by combining lamp heating with hot-wall heating. Lamps 10 are provided outside the furnace body 3 of a hot-wall CVD apparatus. The hot-wall reactor furnace body 3 is preheated to a prescribed temperature. Wafers W are loaded into the furnace body 3, and these wafers W are rapidly heated immediately thereafter to the desired temperature by light emitted by the lamps 10. The lamps 10 are switched off following heating, and the wafer temperature is allowed to reach a uniform state as a result of heat diffusion in the wafers in the hot-wall reactor furnace body 3. It is also possible to adopt an arrangement in which preheating commensurate with the cooling occurring during the transport period is performed before the wafers W are loaded into the furnace body 3, the wafers W are then loaded Into the reactor furnace body 3. and the water temperature is allowed to achieve a uniform state.

摘要翻译： 在晶片内形成均匀的温度，并且通过将灯加热与热壁加热组合来显着降低晶片加热时间，从而实现更高的通量。 灯10设置在热壁CVD装置的炉体3的外部。 将热壁反应炉体3预热至规定温度。 晶片W被装载到炉体3中，并且这些晶片W之后立即被灯10发出的光迅速地加热到期望的温度。加热后关闭灯10，并使晶片温度达到均匀 由于在热壁反应炉体3中的晶片中的热扩散的结果。还可以采用这样一种布置，其中在将晶片W装入其中之前执行在运输期间发生的冷却相当的预热 炉体3，然后将晶片W装载到反应炉体3中，并允许水温达到均匀的状态。

公开(公告)号：US20020025651A1

公开(公告)日：2002-02-28

申请号：US09983355

申请日：2001-10-24

申请人： KOKUSAI ELECTRIC CO., LTD.

发明人： Yushin Takasawa ,  Hajime Karasawa

IPC分类号： H01L021/20 ,  H01L021/8242 ,  H01L021/336 ,  C23C016/00

CPC分类号： C23C16/24 ,  C23C16/4401 ,  H01L28/84 ,  Y10S438/964

摘要： A hemispherical grain (HSG) formation process for enlarging the surface area of a capacitor electrode, wherein stable, defect-free HSG, having outstanding selectivity, is formed. An amorphous silicon layer, which constitutes a capacitor electrode, is formed on an Si wafer, on which is formed a silicon-based dielectric layer, which constitutes an interlevel dielectric layer. An HSG layer, in which there exists practically no defects, is formed on the amorphous silicon layer at a crystal nuclei formation temperature of under 620null C. Further, in accordance with properly controlling the crystal nuclei formation temperature, and the flow rate of monosilane (SiH4), which is supplied for crystal nuclei formation, it is possible to furnish selectivity such that HSG nuclei are formed solely on the amorphous silicon layer, without being formed on a silicon-based dielectric layer.

摘要翻译： 形成用于扩大电容器电极的表面积的半球形晶粒（HSG）形成方法，其中具有优异选择性的稳定的，无缺陷的HSG。 构成电容器电极的非晶硅层形成在构成层间电介质层的Si晶片上，形成硅基电介质层。 在620℃以下的晶核形成温度下，在非晶硅层上形成实际上没有缺陷的HSG层。此外，根据适当地控制晶核形成温度和甲硅烷的流量 （SiH4），其被提供用于晶核形成，可以提供选择性，使得HSG核仅形成在非晶硅层上，而不形成在硅基介电层上。

公开(公告)号：US6148044A

公开(公告)日：2000-11-14

申请号：US783093

申请日：1997-01-14

申请人： Hiroko Ono ,  Masatoshi Takada ,  Kenzo Urabe

发明人： Hiroko Ono ,  Masatoshi Takada ,  Kenzo Urabe

IPC分类号： H04B1/707 ,  H03H21/00 ,  H04B1/16 ,  H04B1/7093 ,  H04J13/00 ,  H03D1/00

CPC分类号： H03H21/0012

摘要： A correlating filter includes a delay circuit which outputs a plurality of tap output signals TP1 to TPn having different delays. The correlating filter further includes a weighted adder circuit which weights the tap output signals, respectively, and adds the weighted tap output signals so as to derive a correlated output signal. A timing control circuit produces a control signal based on the correlated output signal from the weighted adder circuit. The control signal is high in level when the correlated output signal has a correlation peak. A power feed to the weighted adder circuit is achieved via a switching element. The switching element is only turned on when the control signal is high in level so as to enable the power feed to the weighted adder circuit. Thus, reduction in power consumption is achieved and the filter can be used in a portable radio device.

摘要翻译： 相关滤波器包括输出具有不同延迟的多个抽头输出信号TP1至TPn的延迟电路。 相关滤波器还包括加权加法器电路，其分别对抽头输出信号进行加权，并将加权抽头输出信号相加，以便导出相关的输出信号。 定时控制电路基于来自加权加法器电路的相关输出信号产生控制信号。 当相关输出信号具有相关峰值时，控制信号电平高。 通过开关元件实现对加权加法器电路的馈电。 当控制信号为高电平时，开关元件仅导通，以使得能够对加权加法器电路进行供电。 因此，实现了功率消耗的降低，并且滤波器可以用在便携式无线电设备中。

公开(公告)号：US6139642A

公开(公告)日：2000-10-31

申请号：US86475

申请日：1998-05-28

申请人： Takashi Shimahara ,  Naoto Nakamura ,  Ichiro Sakamoto ,  Kiyohiko Maeda

发明人： Takashi Shimahara ,  Naoto Nakamura ,  Ichiro Sakamoto ,  Kiyohiko Maeda

IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/50 ,  H01L21/00 ,  H01L21/205 ,  H01L21/31 ,  C23C16/00

CPC分类号： C23C16/4401 ,  C23C16/4408 ,  C23C16/4412 ,  C23C16/45519

摘要： A substrate processing apparatus and method restrains outside air and gas-phase backward flow from entering the inside of a reaction chamber during a time period that the inside of the reaction chamber is opened to the outside through a substrate carrying-in/carrying-out opening. The substrate processing apparatus can comprise, for example, a vertical CVD apparatus having a gas supply system and a bypass line. The gas supply system supplies inert gas to a space between an outer tube and an inner tube of a reaction furnace during a boat loading period and a boat unloading period. The bypass line exhausts the atmosphere from the reaction chamber by a slow exhaust operation during the boat loading period and the boat unloading period.

摘要翻译： 基板处理装置和方法在反应室内部通过基板输入/输出开口向外部打开的时间段期间限制外部空气和气相逆流进入反应室内部 。 基板处理装置可以包括例如具有气体供给系统和旁路管线的立式CVD装置。 气体供给系统在船装载期间和船卸载期间，向反应炉的外管和内管之间的空间供给惰性气体。 旁路管路在船装载期间和卸船期间通过缓慢的排气操作从反应室排出气氛。

公开(公告)号：US6139641A

公开(公告)日：2000-10-31

申请号：US881147

申请日：1997-06-24

申请人： Yasuhiro Inokuchi ,  Fumihide Ikeda

发明人： Yasuhiro Inokuchi ,  Fumihide Ikeda

IPC分类号： C23C16/44 ,  C23C16/455 ,  H01L21/00 ,  C23C16/00

CPC分类号： C23C16/4557 ,  H01L21/67109

摘要： A substrate processing apparatus comprises a heating member, a reaction tube body provided in the heating member and having a first gas introducing section and a gas exhausting section, a substrate holder disposed in the reaction tube body for horizontally holding a substrate within the reaction tube body between the first gas introducing section and the gas exhausting section, a gas heating tube provided in the heating member along the reaction tube body, and having a second gas introducing section and a gas discharging section which is in communication with the first gas introducing section of the reaction tube body, the gas heating tube being arranged such that a gas flowing in the gas heating tube first flows form the first gas introducing section side toward the gas exhausting section side, and then returns to flow from the gas exhausting section side toward the first gas introducing section side.

摘要翻译： 基板处理装置包括加热构件，设置在加热构件中的反应管体，具有第一气体导入部和排气部，设置在反应管主体中的基板保持件，用于水平地保持反应管体内的基板 在所述第一气体导入部和所述排气部之间设置有沿着所述反应管体设置在所述加热部件中的气体加热管，并且具有第二气体导入部和与所述第一气体导入部连通的气体排出部， 反应管体，气体加热管被布置成使得在气体加热管中流动的气体首先从第一气体引入部分侧朝向排气部侧流动，然后从气体排出部分侧朝向 第一气体导入部侧。

公开(公告)号：US5903606A

公开(公告)日：1999-05-11

申请号：US710981

申请日：1996-09-25

申请人： Kouichiro Okayama

发明人： Kouichiro Okayama

IPC分类号： G06F11/10 ,  H04L1/00 ,  H04B3/46 ,  G06F11/00 ,  H04B17/00

CPC分类号： H04L1/0057 ,  G06F11/10 ,  H04L1/0045

摘要： A receiver receives transmitted data, and a decoder detects the number of error bits in the received data based on check data contained in the received data. If the number of error bits is 2 or less, then when an error correction is instructed by a selector switch, the decoder effects an error correction on message data, and the corrected message data are stored in a RAM. If the number of error bits is more than 2, the decoder does not effect an error correction on the message data, and the message data with error bits are stored in the RAM. When the message data stored in the RAM are displayed on a display screen, the user sees either the corrected message or the uncorrected message.

摘要翻译： 接收机接收发送的数据，解码器根据包含在接收数据中的检查数据来检测接收到的数据中的错误比特数。 如果错误比特数为2以下，则当选择开关指示错误校正时，解码器对消息数据进行纠错处理，校正后的消息数据存储在RAM中。 如果错误位数大于2，则解码器不会对消息数据进行纠错，并且将具有错误位的消息数据存储在RAM中。 当存储在RAM中的消息数据显示在显示屏幕上时，用户看到校正的消息或未校正的消息。

公开(公告)号：US5879415A

公开(公告)日：1999-03-09

申请号：US9991

申请日：1998-01-21

申请人： Masakazu Shimada

发明人： Masakazu Shimada

IPC分类号： C23C14/56 ,  C23C16/44 ,  H01L21/00 ,  H01L21/02 ,  H01L21/205 ,  H01L21/22 ,  H01L21/677 ,  C23C16/00

CPC分类号： H01L21/67757 ,  C23C16/4401 ,  H01L21/67115 ,  Y10S414/137 ,  Y10S414/139 ,  Y10T29/41

摘要： A semiconductor fabricating apparatus comprises a reaction tube defining a space for heat treating a silicon wafer, heater means disposed to extend around the reaction tube, a load-lock chamber connected to the reaction tube by means of a gate valve, a supply pipe communicating with the load-lock chamber for supplying an inert gas and a gas including oxygen thereto, an oxygen densitometer, an inert gas flow rate adjuster and an oxygen flow rate regulator, and based on the results detected by the oxygen densitometer, controls the flow rate of the inert gas and the gas including oxygen, by means of the flow rate adjuster, the flow rate regulator, to maintain the oxygen concentration within the load-lock chamber at a desire value.

摘要翻译： 半导体制造装置包括限定用于硅晶片热处理的空间的反应管，设置成围绕反应管延伸的加热器装置，通过闸阀连接到反应管的加载锁定室，与 用于供给惰性气体的负载锁定室和包含氧的气​​体，氧浓度计，惰性气体流量调节器和氧气流量调节器，并且基于由氧气密度计检测的结果，控制流量 惰性气体和包括氧的气体，通过流量调节器，流量调节器，以将负载锁定室内的氧气浓度保持在期望值。

公开(公告)号：US5832123A

公开(公告)日：1998-11-03

申请号：US754326

申请日：1996-11-21

申请人： Ouichi Oyamada

发明人： Ouichi Oyamada

IPC分类号： H04N1/393 ,  G06T5/00 ,  H04N1/405 ,  H04N1/409 ,  G06K9/44 ,  G06T3/40 ,  H04N1/40

CPC分类号： G06T5/002 ,  G06T5/20 ,  H04N1/4092 ,  G06T2200/12 ,  G06T2207/30176

摘要： An image enhancement method and an image enhancement apparatus is provided, wherein a multiple-gray-level converter of a grayscale converter converts an original two-grayscale image, an image enhancement device enhances the resultant image so that gray values for the outline of the image are smoothly changed, and a two-gray-level converter converts the enhanced image to a two-grayscale image by referring to a specific value that is set in advance. The image enhancement method and the image enhancement apparatus of the present invention resolve the conventional problem of jaggies that appear in the outline of an enhanced image and make the image appear unattractive, and they thus produce a high quality enhanced two-grayscale image that has a smoother outline.

摘要翻译： 提供了一种图像增强方法和图像增强装置，其中灰阶转换器的多灰度转换器转换原始的两灰度图像，图像增强装置增强所得图像，使得图像轮廓的灰度值 平滑地改变，并且两灰度级转换器通过参考预先设定的特定值将增强图像转换成双灰度图像。 本发明的图像增强方法和图像增强装置解决了出现在增强图像的轮廓中的锯齿的常规问题，并使图像看起来不吸引人，并且因此产生高质量增强的二灰度图像，其具有 平滑轮廓

公开(公告)号：US5815817A

公开(公告)日：1998-09-29

申请号：US689104

申请日：1996-07-30

申请人： Kazuhiro Suzuki

发明人： Kazuhiro Suzuki

IPC分类号： H04M3/42 ,  H04B7/26 ,  H04M3/56 ,  H04Q11/04 ,  H04W4/00 ,  H04Q9/00

CPC分类号： H04M3/568 ,  H04M3/56 ,  H04W4/00

摘要： An information broadcasting method for a communication system including a plurality of stations. The communication system enables any two of the stations to communicate with one another. The communication system includes a conference trunk having at least four channels. One of the channels is an information broadcasting channel for use only in an information broadcasting operation wherein any one of the stations broadcasts information to all of the stations simultaneously via the information broadcasting channel. All other ones of the channels are conference communication channels for use in conference communication wherein any three or more of the stations communicate with one another simultaneously via any three or more of the conference communication channels. During an information broadcasting operation, any one of the stations which is receiving broadcast information from another one of the stations can transmit information to all of the stations in the system, including the station which is broadcasting information, via a vacant conference communication channel in the conference trunk, thereby engaging in bidirectional communication with the station which is broadcasting information during the information broadcasting operation.

摘要翻译： 一种用于包括多个站的通信系统的信息广播方法。 通信系统使任何两个站彼此通信。 通信系统包括具有至少四个信道的会议中继线。 其中一个信道是仅在信息广播操作中使用的信息广播信道，其中任何一个站经由信息广播信道同时向所有站广播信息。 所有其他信道是用于会议通信的会议通信信道，其中任何三个或更多个站通过任何三个或更多个会议通信信道同时彼此通信。 在信息广播操作期间，从另一个站接收广播信息的站中的任何一个站可以经由空闲的会议通信信道向系统中的所有站发送信息，包括正在广播信息的站 会议中继线，从而在信息广播操作期间与广播信息的站进行双向通信。

公开(公告)号：US5802078A

公开(公告)日：1998-09-01

申请号：US736260

申请日：1996-10-24

申请人： Kenzo Urabe ,  Giho Makino ,  Syunji Tochihara ,  Yasuhiro Murayama ,  Atsushi Hoshi

发明人： Kenzo Urabe ,  Giho Makino ,  Syunji Tochihara ,  Yasuhiro Murayama ,  Atsushi Hoshi

IPC分类号： H03M13/15 ,  G06F11/00

CPC分类号： H03M13/151 ,  H03M13/159

摘要： There is disclosed an acceptable error detector for error correcting block codes, in which of received syndrome vectors S for the received word vectors Y available from the syndrome generator, the m.sub.e -bit received subsyndromes S(m.sub.e) formed by the same components as those of the m.sub.e -bit representative subsyndromes uniquely corresponding to the vectors of all the acceptable error pattern with error bits equal to or less than the acceptable number e is applied as addresses into the redundant subsyndrome table memory. Since the stored data specified by the input address are (m-m.sub.e)-bit redundant subsyndromes which are supposed to appear in the remaining portion of S(= ) when the number of error bits is equal to or less than e, the remaining (m-m.sub.e)-bit received subsyndromes S(m-m.sub.e) derived from the received word vector Y in the syndrome generator and the (m-m.sub.e)-bit redundant subsyndrome obtained from the redundant subsyndrome table memory are compared with each other by a coincidence detector to detect coincidence or noncoincidence therebetween. By this configuration, it is possible to detect whether the number of error bits in received word is acceptable.

摘要翻译： 公开了一种用于纠错块码的可接受的误差检测器，其中针对从校正子发生器可用的接收到的字向量Y的接收到的校正子向量S中的me位接收到的子信号S（me）由与 唯一对应于错误位等于或小于可接受数e的所有可接受的错误模式的向量唯一对应的me位代表子信号，当错误位数 等于或小于e，从校正子发生器中的接收到的字矢量Y导出的剩余的（m-me）位接收子信号S（m-me）和（m-me）位冗余次级信号S 通过重合检测器将从冗余子综合表存储器获得的m-me进行比较，以检测它们之间的一致性或非一致性。 通过该配置，可以检测接收字中的错误位的数目是否可接受。