发明授权
- 专利标题: Method of fabricating electrostatic discharge protection device
- 专利标题(中): 制造静电放电保护装置的方法
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申请号: US997874申请日: 1997-12-24
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公开(公告)号: US5960288A公开(公告)日: 1999-09-28
- 发明人: Gary Hong , Joe Ko
- 申请人: Gary Hong , Joe Ko
- 申请人地址: TWX
- 专利权人: United Semiconductor Corp.
- 当前专利权人: United Semiconductor Corp.
- 当前专利权人地址: TWX
- 优先权: TWX86111504 19970812
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L21/265
摘要:
A method of fabricating an electrostatic protection device, comprises a semiconductor substrate which includes a first type well, a second type well, and a field oxide layer in between. A first gate, a first spacer, and a first source/drain are formed in the first type well. The second type has a second gate, a second spacer, and the second source/drain formed therein. In addition, an oxide layer is distributed on the first gate, the second gate, a part of the first source/drain, and a part of the second source/drain. A silicide layer is formed on the uncovered first source/drain and the uncovered second source/drain. Therefore, the silicide layer and the gate oxide layer are spaced apart.
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