Invention Grant
- Patent Title: Method and tool for handling micro-mechanical structures
- Patent Title (中): 用于处理微机械结构的方法和工具
-
Application No.: US908648Application Date: 1997-08-07
-
Publication No.: US5966591APublication Date: 1999-10-12
- Inventor: David D. Roberts
- Applicant: David D. Roberts
- Applicant Address: CA Milpitas
- Assignee: Read-Rite Corporation
- Current Assignee: Read-Rite Corporation
- Current Assignee Address: CA Milpitas
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/673 ; H01L21/44
Abstract:
A method of forming and handling an array of micro-devices such as thin film devices that enables simultaneous mass handling and processing of these thin film devices. A plurality of micro-devices and links are simultaneously formed on a wafer, with the links interconnecting the micro-devices for maintaining a unitary array structure. A matrix of magnetic strips is then formed to impart added overall tensile strength to the array. The magnetic strips are secured to the links and form a planar support grid therewith. The array of micro-devices is then released from the wafer and lifted therefrom by means of a magnetic pick-up tool. Using the pick-up tool, the array is transferred onto a magnetic chuck which securely retains the array. Conductive wires are bonded to a row of micro-devices devices which are then separated from the array into individual micro-devices.
Public/Granted literature
- US5241150A Microwave food package Public/Granted day:1993-08-31
Information query
IPC分类: