Invention Grant
US5966591A Method and tool for handling micro-mechanical structures 失效
用于处理微机械结构的方法和工具

Method and tool for handling micro-mechanical structures
Abstract:
A method of forming and handling an array of micro-devices such as thin film devices that enables simultaneous mass handling and processing of these thin film devices. A plurality of micro-devices and links are simultaneously formed on a wafer, with the links interconnecting the micro-devices for maintaining a unitary array structure. A matrix of magnetic strips is then formed to impart added overall tensile strength to the array. The magnetic strips are secured to the links and form a planar support grid therewith. The array of micro-devices is then released from the wafer and lifted therefrom by means of a magnetic pick-up tool. Using the pick-up tool, the array is transferred onto a magnetic chuck which securely retains the array. Conductive wires are bonded to a row of micro-devices devices which are then separated from the array into individual micro-devices.
Public/Granted literature
Information query
Patent Agency Ranking
0/0