发明授权
- 专利标题: Apparatus for manufacturing single crystal of silicon
- 专利标题(中): 用于制造单晶硅的装置
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申请号: US822088申请日: 1997-03-20
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公开(公告)号: US5968266A公开(公告)日: 1999-10-19
- 发明人: Eiichi Iino , Masanori Kimura , Shozo Muraoka
- 申请人: Eiichi Iino , Masanori Kimura , Shozo Muraoka
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-097704 19960327
- 主分类号: C30B15/14
- IPC分类号: C30B15/14 ; C30B29/06 ; C30B33/04 ; H01L21/208 ; C30B35/00
摘要:
An apparatus for manufacturing a single crystal of silicon includes a crucible, a heater, electrodes, and a magnet. In addition to a plurality of heat generating portions and two main electrode portions, the heater has two or more auxiliary electrode portions. Two or more heater support members having an insulating property are further provided so as to support the heater through the auxiliary electrode portions. The number of heat generating portions which may be present between a heater support member and an electrode and between heater support members if adjacent to each other is equal to or less than 4. Each generating portion of the heater has a thickness of 25 mm or more. This structure makes it possible to produce a single crystal of silicon without causing breakage of a heater, even if a large electric current flows through the heater, even if a magnetic field of a high intensity is applied to a silicon melt in the crucible, and even if the heater has a large diameter.
公开/授权文献
- US5304093A Method and apparatus for controlling a fluid flow valve 公开/授权日:1994-04-19
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