发明授权
- 专利标题: Split-gate memory device and method for accessing the same
- 专利标题(中): 分闸存储器件及其访问方法
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申请号: US876576申请日: 1997-06-16
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公开(公告)号: US5969383A公开(公告)日: 1999-10-19
- 发明人: Kuo-Tung Chang , Ko-Min Chang , Wei-Ming Chen , Keith Forbes , Douglas R. Roberts
- 申请人: Kuo-Tung Chang , Ko-Min Chang , Wei-Ming Chen , Keith Forbes , Douglas R. Roberts
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L21/28 ; H01L21/8247 ; H01L27/115 ; H01L29/423 ; H01L29/788 ; H01L29/792
摘要:
An EEPROM device includes a split-gate FET (10) having a source (36), a drain (22), a select gate (16) adjacent the drain (22), and a control gate (32) adjacent the source (36). When programming the split-gate FET (10), electrons are accelerated in a portion of a channel region (38) between the select gate (16) and the control gate (32), and then injected into a nitride layer (24) of an ONO stack (25) underlying the control gate (32). The split-gate FET (10) is erased by injecting holes from the channel region (38) into the charge nitride layer (24). When reading data from the split-gate FET (10), a reading voltage is applied to the drain (22) adjacent the select gate (16). Data is then read from the split-gate FET (10) by sensing a current flowing in a bit line coupled to the drain (22).
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