Invention Grant
- Patent Title: Method and apparatus employing external light source for endpoint detection
-
Application No.: US963508Application Date: 1997-11-04
-
Publication No.: US5969805APublication Date: 1999-10-19
- Inventor: David R. Johnson , Joe Lee Phillips , Todd C. Nielsen , Robert J. Hatfield
- Applicant: David R. Johnson , Joe Lee Phillips , Todd C. Nielsen , Robert J. Hatfield
- Applicant Address: ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: ID Boise
- Main IPC: G01N21/27
- IPC: G01N21/27 ; G01N21/55 ; G01N21/64 ; G01N21/88 ; G01N21/956 ; H01J37/32 ; H01L21/00 ; H01L21/027 ; H01L21/302 ; H01L21/3065 ; H01L21/66 ; G01B11/00 ; G01B11/06
Abstract:
A method and apparatus for endpoint detection for the stripping of a particular material, such as photo-resist material, from a substrate surface. A beam of light is projected onto the substrate surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a control mechanism which determines the proper disposition of the substrate. The control mechanism controls the cessation of the stripping process and may control a substrate-handling device which sequentially transfers substrates to and from a stripping chamber.
Public/Granted literature
- US5343967A Apparatus for optional straight or directional drilling underground formations Public/Granted day:1994-09-06
Information query
