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1.发明授权公开(公告)号：US06429928B2
公开(公告)日：2002-08-06
申请号：US09399242
申请日：1999-09-20
IPC分类号： G01B1100
CPC分类号： H01L21/67253 , G01N21/55 , G01N21/64 , G01N21/6489 , H01J37/32935 , H01J2237/335
摘要： A method and apparatus for endpoint detection for the stripping of a particular material, such as photo-resist material, from a substrate surface. A beam of light is projected onto the substrate surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a control mechanism which determines the proper disposition of the substrate. The control mechanism controls the cessation of the stripping process and may control a substrate-handling device which sequentially transfers substrates to and from a stripping chamber.
摘要翻译： 用于从衬底表面剥离诸如光致抗蚀剂材料的特定材料的端点检测的方法和装置。 光束投射到基板表面上，并且通过光检测器测量特定波段的发光和/或反射光强度。 光强度被转换为数值，并以电子方式传送到确定衬底的适当布置的控制机构。 控制机构控制剥离过程的停止并且可以控制将衬底顺序地转移到剥离室和从剥离室传送衬底的衬底处理装置。
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公开(公告)号：US5969805A
公开(公告)日：1999-10-19
申请号：US963508
申请日：1997-11-04
IPC分类号： G01N21/27 , G01N21/55 , G01N21/64 , G01N21/88 , G01N21/956 , H01J37/32 , H01L21/00 , H01L21/027 , H01L21/302 , H01L21/3065 , H01L21/66 , G01B11/00 , G01B11/06
CPC分类号： H01L21/67253 , G01N21/55 , G01N21/64 , H01J37/32935 , G01N21/6489 , H01J2237/335
摘要： A method and apparatus for endpoint detection for the stripping of a particular material, such as photo-resist material, from a substrate surface. A beam of light is projected onto the substrate surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a control mechanism which determines the proper disposition of the substrate. The control mechanism controls the cessation of the stripping process and may control a substrate-handling device which sequentially transfers substrates to and from a stripping chamber.
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公开(公告)号：US06509960B2
公开(公告)日：2003-01-21
申请号：US09796232
申请日：2001-02-28
IPC分类号： G01B1100
CPC分类号： H01L21/67253 , G01N21/55 , G01N21/64 , G01N21/6489 , H01J37/32935 , H01J2237/335
摘要： A method and apparatus for endpoint detection for the stripping of a particular material, such as photo-resist material, from a substrate surface. A beam of light is projected onto the substrate surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a control mechanism which determines the proper disposition of the substrate. The control mechanism controls the cessation of the stripping process and may control a substrate-handling device which sequentially transfers substrates to and from a stripping chamber.
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4.发明授权Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light 失效使用过滤的荧光，反射或吸收光进行自动化，原位材料检测的方法和装置公开(公告)号：US07102737B2
公开(公告)日：2006-09-05
申请号：US10861738
申请日：2004-06-04
CPC分类号： G01N21/9501 , G01N21/643 , G01N21/94 , G01N2021/646
摘要： A method and apparatus for detection of a particular material, such as photo-resist material, on a sample surface are disclosed. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit, which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.
摘要翻译： 公开了一种在样品表面上检测特定材料如光致抗蚀剂材料的方法和装置。 将窄光束投影到样品表面上，并且通过光检测器测量在特定波长带处的荧光和/或反射光强度。 光强度被转换为数值，并以电子方式传输到逻辑电路，这决定了样品的正确配置。 逻辑电路控制一个样本处理机器人装置，该装置将样本顺序地传送到用于测试和随后的配置的阶段。 该方法对于在半导体晶片的表面上检测光致抗蚀剂材料特别有用。
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公开(公告)号：US06256094B1
公开(公告)日：2001-07-03
申请号：US09475439
申请日：1999-12-30
IPC分类号： G01N2188
CPC分类号： G01N21/6456 , G01N21/4738 , G01N21/643 , G01N21/6458 , G01N21/94 , G01N21/9501 , G01N2021/6421 , G01N2021/646 , G01N2021/6471
摘要： A method and apparatus for detection of a particular material, such as photo-resist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.
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6.发明授权Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light 失效使用过滤的荧光，反射或吸收光进行自动化，原位材料检测的方法和装置公开(公告)号：US06831734B2
公开(公告)日：2004-12-14
申请号：US10093350
申请日：2002-03-07
IPC分类号： G01N2164
CPC分类号： G01N21/6456 , G01N21/4738 , G01N21/643 , G01N21/6458 , G01N21/94 , G01N21/9501 , G01N2021/6421 , G01N2021/646 , G01N2021/6471
摘要： A method and apparatus for detection of a particular material, such as photo-resist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.
摘要翻译： 用于在样品表面上检测诸如光致抗蚀剂材料的特定材料的方法和装置。 将窄光束投影到样品表面上，并且通过光检测器测量在特定波长带处的荧光和/或反射光强度。 光强度被转换为数值，并以电子方式传输到逻辑电路，这决定了样品的正确配置。 逻辑电路控制一个样本处理机器人装置，该装置将样本顺序地传送到用于测试和随后的配置的阶段。 该方法对于在半导体晶片的表面上检测光致抗蚀剂材料特别有用。
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7.发明授权Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light 失效使用过滤的荧光，反射或吸收光进行自动化，原位材料检测的方法和装置公开(公告)号：US06704107B1
公开(公告)日：2004-03-09
申请号：US08964451
申请日：1997-11-04
IPC分类号： G01B1100
CPC分类号： G01N21/6456 , G01N21/4738 , G01N21/643 , G01N21/6458 , G01N21/94 , G01N21/9501 , G01N2021/6421 , G01N2021/646 , G01N2021/6471
摘要： A method and apparatus for detection of a particular material, such as photoresist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.
摘要翻译： 用于在样品表面上检测诸如光致抗蚀剂材料的特定材料的方法和装置。 将窄光束投影到样品表面上，并且通过光检测器测量在特定波长带处的荧光和/或反射光强度。 将光强度转换为数值，并将其电子传输到确定样品的正确配置的逻辑电路。 逻辑电路控制一个样本处理机器人装置，该装置将样本顺序地传送到用于测试和随后的配置的阶段。 该方法对于在半导体晶片的表面上检测光致抗蚀剂材料特别有用。
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公开(公告)号：US06369887B2
公开(公告)日：2002-04-09
申请号：US09842513
申请日：2001-04-25
IPC分类号： G01N2188
CPC分类号： G01N21/6456 , G01N21/4738 , G01N21/643 , G01N21/6458 , G01N21/94 , G01N21/9501 , G01N2021/6421 , G01N2021/646 , G01N2021/6471
摘要： A method and apparatus for detection of a particular material, such as photo-resist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.
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公开(公告)号：US06179448B2
公开(公告)日：2001-01-30
申请号：US09025213
申请日：1998-02-18
IPC分类号： F21V2128
摘要： An apparatus and method for automatically tuning the power and the intensity of light supplied to an illuminated object to some desired values, the apparatus including a light source positionable along at least a first axis with respect to a reflector, a drive assembly for positioning the light source in response to an intensity of light measured by a light meter positioned to sample light reflected from the object along a reflected light path, and a diaphragm having an adjustable aperture for controlling the amount of light supplied to the object. The light source is automatically positioned along the first axis to achieve a maximum intensity of light on the object. The light source may then be automatically positioned along a second axis and a third axis to achieve respective maximum light intensities on the object.
摘要翻译： 一种用于自动调节供应给被照明物体的光的功率和强度达到某些期望值的装置和方法，该装置包括可沿着至少第一轴线相对于反射器定位的光源，用于定位光的驱动组件 响应于由被定位成沿着反射光路对从物体反射的光进行采样的光计测量的光强度的光源，以及具有用于控制提供给对象的光量的可调节光圈的光阑。 光源沿着第一轴自动定位，以实现物体上最大的光强度。 然后可以沿着第二轴和第三轴自动地定位光源，以实现物体上的相应的最大光强度。
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公开(公告)号：US08290997B2
公开(公告)日：2012-10-16
申请号：US12956512
申请日：2010-11-30
申请人： Christopher S. Davis , David R. Johnson , Robert F. Day , Stephan Hoefnagels , Timothy P. McKee
发明人： Christopher S. Davis , David R. Johnson , Robert F. Day , Stephan Hoefnagels , Timothy P. McKee
IPC分类号： G06F17/30
CPC分类号： G06F17/30067 , G06F17/30115 , G06F17/30123 , G06F17/30176
摘要： A file operations engine is provided that manages many user interactions with their files via a computer system. The operation engine may provide a user with the option to keep both files that have a file name conflict. It may further permit the user to rename a file involved with a file name conflict. The operations engine may also automatically rename one of the files of a file name conflict by appending a character to a root of the filename. The character may include the lowest integer available for the root in a destination for the files. The operations engine may provide the option to keep both files as part of a pre-calculation of potential errors for a requested operation. The operations engine may place file name conflicts in an error queue and permit the user to select an option to keep both files after the conflict is encountered.
摘要翻译： 提供了一种文件操作引擎，通过计算机系统管理与他们的文件的许多用户交互。 操作引擎可以向用户提供保持具有文件名冲突的两个文件的选项。 它还可以允许用户重命名涉及文件名冲突的文件。 操作引擎还可以通过将文件附加到文件名的根来自动重命名文件名冲突的一个文件。 字符可能包括可用于文件目标中根目录的最小整数。 操作引擎可以提供将两个文件作为对所请求操作的潜在错误的预先计算的一部分的选项。 操作引擎可能会将文件名冲突置于错误队列中，并允许用户选择一个选项以在遇到冲突后保留这两个文件。
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