发明授权
- 专利标题: Method and apparatus for inspecting defects of surface shape
- 专利标题(中): 检查表面形状缺陷的方法和装置
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申请号: US880543申请日: 1997-06-23
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公开(公告)号: US5973777A公开(公告)日: 1999-10-26
- 发明人: Mineo Nomoto , Takanori Ninomiya , Yuji Takagi
- 申请人: Mineo Nomoto , Takanori Ninomiya , Yuji Takagi
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-164391 19960625
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G01N21/00 ; G01B11/24 ; G01B11/30
摘要:
In order to detect a local shape defect on an inner surface of an ordinary plane member with a high degree of accuracy as a state distinguished from a big waviness deformation, a surface-shape-defect inspecting method and apparatus for identifying the shape defect on the inner surface of the plane member is provided. The method and apparatus provides for scanning optically the entire area of the plane member, extracting a shape of the surface of the plane member as absolute height displacement data at scanning positions, finding a difference between a reference surface shape inferred from the extracted shape of the surface of the plane member and the shape of the surface, and using the difference as relative height displacement data with respect to the reference surface shape, and detecting the shape defect on the surface by identifying the location of the shape defect through comparison of the relative height displacement data with predetermined allowable displacement.
公开/授权文献
- US5265632A Cleaning apparatus 公开/授权日:1993-11-30
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