发明授权
- 专利标题: Downstream monitor for CMP brush cleaners
- 专利标题(中): CMP洗刷机下游监视器
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申请号: US136835申请日: 1998-08-20
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公开(公告)号: US5974868A公开(公告)日: 1999-11-02
- 发明人: Donald M. Decain , Cuc K. Huynh , Robert A. Jurjevic , Douglas P. Nadeau , Marc A. Taubenblatt
- 申请人: Donald M. Decain , Cuc K. Huynh , Robert A. Jurjevic , Douglas P. Nadeau , Marc A. Taubenblatt
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: B08B3/00
- IPC分类号: B08B3/00 ; G01N33/00 ; H01L21/00 ; B05C11/00 ; B03D3/00 ; G01N15/02
摘要:
The present invention is a contamination measuring device and method of using the same according to a Chemical Mechanical Polishing (CMP) brush cleaner equipment/technology. A collection device is mounted in a brush cleaning device for collecting effluent which flows off of a wafer. The effluent is passed to a particle counter which measures the contamination levels of the effluent. A computer stores the data collected by the particle counter and computes the particles per liter of effluent and provides real time data. The contamination of the effluent corresponds to the contamination of the brushes in the cleaning device and therefore is means for predicting when the brushes in the cleaning device should be replaced.
公开/授权文献
- US5367276A Method case circuit breaker movable contact arm arrangement 公开/授权日:1994-11-22
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