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公开(公告)号：US5834642A
公开(公告)日：1998-11-10
申请号：US898847
申请日：1997-07-25
CPC分类号： H01L21/67253 , B08B3/00 , H01L21/67046 , G01N2033/0095
摘要： The present invention is a contamination measuring device and method of using the same according to a Chemical Mechanical Polishing (CMP) brush cleaner equipment/technology. A collection device is mounted in a brush cleaning device for collecting effluent which flows off of a wafer. The effluent is passed to a particle counter which measures the contamination levels of the effluent. A computer stores the data collected by the particle counter and computes the particles per liter of effluent and provides real time data. The contamination of the effluent corresponds to the contamination of the brushes in the cleaning device and therefore is means for predicting when the brushes in the cleaning device should be replaced.
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公开(公告)号：US5133602A
公开(公告)日：1992-07-28
申请号：US682752
申请日：1991-04-08
CPC分类号： G01N15/0205 , G01N2015/0238 , G01N2021/1759 , G01N2021/4792
摘要： A bright-field, particle position determining optical system is disclosed that uses both phase shift and extinction signals to determine particle trajectories. In a first embodiment, a pair of orthogonally polarized beams are positioned along an axis that intersects a particle's flow path at an acute angle. An optical system recombines the beams after they exit the flow path, the combined beams manifesting an elliptical polarization if a particle intersects one of the beams. Bright field detectors detect polarization components of the combined beam, provide a phase shift signal between the beam's orthogonal components and provide corresponding signals to a processor. The processor determines a signal asymmetry from the phase shift signal that is indicative of a particle's position in the flow path. Another embodiment of the invention examines a signal resulting from the beam's phase shift and determines a correction factor that is dependent upon the distance of the particle from the focal plane of the beams. Another embodiment employs a dithering system for cyclically moving one or more optical beams across a particle to further enable its trajectory or position to be determined.
摘要翻译： 公开了使用相移和消光信号来确定粒子轨迹的明场，粒子位置确定光学系统。 在第一实施例中，一对正交偏振光束沿着与颗粒的流动通道以锐角相交的轴线定位。 光束在离开流路之后将光束重新组合，如果粒子与光束之一相交，那么组合光束表现出椭圆极化。 光场检测器检测组合光束的偏振分量，在光束的正交分量之间提供相移信号，并向处理器提供相应的信号。 处理器确定来自指示颗粒在流动路径中的位置的相移信号的信号不对称性。 本发明的另一个实施例检查由光束的相移产生的信号，并确定取决于粒子与光束的焦平面的距离的校正因子。 另一个实施例采用抖动系统来循环移动一个或多个光束穿过颗粒，以进一步确定其轨迹或位置。
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公开(公告)号：US5294806A
公开(公告)日：1994-03-15
申请号：US17214
申请日：1993-02-12
CPC分类号： G01N15/0205 , G01N21/94 , G01N15/1434 , G01N2015/0238 , G01N2015/145
摘要： A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs an optical beam to a beam splitter that produces first and second beams. An optical system directs the first beam into the enclosed volume. A detector is positioned adjacent the volume in order to receive back scattered optical energy arising from a particle in the volume encountering the first beam. The back scattered optical energy and the second beam are optically combined so as to overlap in a region and in the overlap region the back scattered optical energy and second beam are in the same state of focus, of the same polarization and are substantially parallel. A detector located at the overlap region produces an electrical signal indicative of the intensity of the back scattered light. A signal processor analyzes the electrical signal to determine the presence of the particle.
摘要翻译： 确定封闭体积中颗粒的存在的粒子检测器包括将光束引导到产生第一和第二光束的分束器的激光器。 光学系统将第一光束引导到封闭的体积中。 检测器邻近体积定位，以便接收从遇到第一光束的体积中的颗粒产生的反向散射的光能。 后散射光能和第二光束被光学组合以便在区域中重叠，并且在重叠区域中，后散射光能和第二光束处于相同偏振的相同聚焦状态并且基本平行。 位于重叠区域的检测器产生指示背散射光强度的电信号。 信号处理器分析电信号以确定颗粒的存在。
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公开(公告)号：US5343290A
公开(公告)日：1994-08-30
申请号：US897198
申请日：1992-06-11
IPC分类号： G01B9/02 , G01B11/30 , G01J9/04 , G01N21/47 , G01N21/88 , G01N21/93 , G01N21/94 , G01N21/95 , G01N21/956 , H01L21/66
CPC分类号： G01N21/94 , G01J9/04 , G01N2021/8822 , G01N21/47 , G01N21/9501
摘要： A heterodyne interferometer is combined with darkfield surface particle detection for improved surface particle detection sensitivity. The probe beam and the reference beam have different wavelengths. The reference beam may either be a real reference beam or a virtual reference beam. The probe beam may be incident at the surface at either a grazing angle or at an angle substantially normal to the surface. The real reference beam is incident at the surface at a grazing angle. The detection may either be conventional heterodyne detection or a combination of heterodyne and Lloyd's mirror detection.
摘要翻译： 外差干涉仪与暗场表面颗粒检测相结合，提高表面颗粒检测灵敏度。 探测光束和参考光束具有不同的波长。 参考光束可以是真实参考光束或虚拟参考光束。 探针光束可以以掠射角度或基本上垂直于表面的角度入射在表面处。 实际参考光束以掠射角入射在表面。 检测可以是常规外差检测或外差和劳合镜检测的组合。
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公开(公告)号：US5974868A
公开(公告)日：1999-11-02
申请号：US136835
申请日：1998-08-20
CPC分类号： H01L21/67253 , B08B3/00 , H01L21/67046 , G01N2033/0095
摘要： The present invention is a contamination measuring device and method of using the same according to a Chemical Mechanical Polishing (CMP) brush cleaner equipment/technology. A collection device is mounted in a brush cleaning device for collecting effluent which flows off of a wafer. The effluent is passed to a particle counter which measures the contamination levels of the effluent. A computer stores the data collected by the particle counter and computes the particles per liter of effluent and provides real time data. The contamination of the effluent corresponds to the contamination of the brushes in the cleaning device and therefore is means for predicting when the brushes in the cleaning device should be replaced.
摘要翻译： 本发明是根据化学机械抛光（CMP）刷清洁器设备/技术的污染测量装置及其使用方法。 收集装置安装在刷清洁装置中，用于收集从晶片流出的流出物。 流出物被传递到测量流出物污染水平的颗粒计数器。 计算机存储由颗粒计数器收集的数据，并计算每升流出物的颗粒数，并提供实时数据。 流出物的污染物对应于清洁装置中的刷子的污染，因此是用于预测何时应该更换清洁装置中的刷子的装置。
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公开(公告)号：US5192870A
公开(公告)日：1993-03-09
申请号：US820709
申请日：1992-01-14
CPC分类号： G01N15/0205 , G01N21/94 , G01N15/1434 , G01N2015/0238 , G01N2015/145
摘要： A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs a coherent optical beam to a beam splitter that produces first and second divergent beams. An optical system images the point of origin of the two divergent beams within the beam splitter into the enclosed volume, whereby the first and second beams are caused to intersect and interfere at an inspection region within the volume. A detector is positioned adjacent the volume and is responsive to light scattered from one of the beams, as a result of a particle passing through the inspection region, to produce an electrical signal indicative of the intensity of the scattered light. A signal processor analyzes the electrical signals and to determine the presence of the particle. An embodiment of the invention includes an acousto-optic modulator to enable one of the beams to be frequency shifted from the other beam so as to enable the presence of a carrier signal on which a particle's Doppler frequency is modulated. Another embodiment relies upon the Doppler modulation of a reflected optical beam to create an interference pattern at a detector.
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公开(公告)号：US5158690A
公开(公告)日：1992-10-27
申请号：US837507
申请日：1992-02-18
摘要： A thermophoretic filter cell for the filtering of particles from a liquid is constructed in a particular manner so that the liquid introduced into the filter acts as the heat sink. The cell is designed so that the thermophoretic velocity of the particles in the liquid equals or exceeds the velocity (flow rate per unit area) at which the liquid is passing through the filter.
摘要翻译： 以特定的方式构造用于从液体中过滤颗粒的热溶胶过滤池，使得引入过滤器的液体用作散热器。 设计电池使得液体中的颗粒的热泳速度等于或超过液体通过过滤器的速度（每单位面积的流速）。
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8.发明授权
公开(公告)号：US5061070A
公开(公告)日：1991-10-29
申请号：US184639
申请日：1988-04-22
申请人： John S. Batchelder , Donald M. DeCain , Marc A. Taubenblatt , Hermantha K. Wickramasinghe , Clayton C. Williams
发明人： John S. Batchelder , Donald M. DeCain , Marc A. Taubenblatt , Hermantha K. Wickramasinghe , Clayton C. Williams
IPC分类号： G01N15/14 , G01J9/02 , G01N15/00 , G01N15/02 , G01N15/06 , G01N21/23 , G01N21/45 , G01N21/94
CPC分类号： G01N21/45 , G01J2009/0261 , G01N2015/0011 , G01N2015/0053 , G01N2015/0238 , G01N21/94
摘要： A method and apparatus for monitoring process fluids used in the manufacture of semiconductor components and other microelectronic devices relies upon detection of the phase shift of a pair of optical energy beams encountering a bubble or particle in the fluid. The system distinguishes between bubbles and particles having indices of refraction greater than the surrounding fluid and between different types and sizes of particles.
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