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US5976684A Organic substrate provided with a light absorptive antireflection film and process for its production 失效
具有光吸收性防反射膜的有机基板及其制造方法

Organic substrate provided with a light absorptive antireflection film
and process for its production
摘要:
An organic substrate provided with a light absorptive antireflection film, which contains an organic substrate, and a light absorbing film and a low refractive index film formed in this order on the substrate, to reduce reflection of incident light from the low refractive index film side, wherein the organic substrate has its surface plasma-treated, and a layer made essentially of at least one member selected from the group consisting of silicon, a silicon nitride, a silicon oxide and a silicon oxy-nitride, is formed between the plasma-treated substrate surface and the light absorbing film.
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