发明授权
US5976933A Process for manufacturing an integrated circuit comprising an array of
memory cells
失效
一种用于制造包括存储单元阵列的集成电路的方法
- 专利标题: Process for manufacturing an integrated circuit comprising an array of memory cells
- 专利标题(中): 一种用于制造包括存储单元阵列的集成电路的方法
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申请号: US897799申请日: 1997-07-21
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公开(公告)号: US5976933A公开(公告)日: 1999-11-02
- 发明人: Claudio Brambilla , Manlio Sergio Cereda , Giancarlo Ginami
- 申请人: Claudio Brambilla , Manlio Sergio Cereda , Giancarlo Ginami
- 申请人地址: ITX Agrate Brianza
- 专利权人: SGS-Thomson Microelectronics S.r.l.
- 当前专利权人: SGS-Thomson Microelectronics S.r.l.
- 当前专利权人地址: ITX Agrate Brianza
- 优先权: EPX97830359 19970716
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L23/528 ; H01L27/105 ; H01L27/115
摘要:
A process for manufacturing an integrated circuit comprising an array of memory cells, providing for: a) forming in a memory cell array area of a semiconductor layer (6) an active area for the memory cells; b) forming over said active area for the memory cells a gate oxide layer (8); c) forming over the whole integrated circuit a first layer of conductive material (9); d) forming over the first layer of conductive material (9) a layer of insulating material (10); e) removing the layer of insulating material (10) from outside the memory cell array area; f) forming over the whole integrated circuit a second layer of conductive material (11) which in the memory cell array area is separated from the first layer of conductive material (9) by the insulating material layer (10), while outside the memory cell array area is directly superimposed over said first layer of conductive material (9); g) inside the memory cell array area, defining first strips (22) of the second layer of conductive material (11) for forming rows (3) of the memory cell array (1), and outside the memory cell array area defining second strips (17) of the second layer of conductive material (11) for forming interconnection lines (100) for electrically interconnecting the rows (3) of the memory cell array with a circuitry (5,RD) said, first strips (22) and the second strips (17) of the second layer of conductive material (11) are automatically joined at respective ends thereof at said boundary region.
公开/授权文献
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