发明授权
- 专利标题： Puncture resistant electrostatic chuck
- 专利标题（中）： 耐刺穿静电卡盘
-
申请号： US015802申请日： 1998-01-29
-
公开(公告)号： US5986875A公开(公告)日： 1999-11-16
- 发明人: Arik Donde , Hyman J. Levinstein , Robert W. Wu , Andreas Hegedus , Edwin C. Weldon , Shamouil Shamouilian , Jon T. Clinton , Surinder S. Bedi
- 申请人： Arik Donde , Hyman J. Levinstein , Robert W. Wu , Andreas Hegedus , Edwin C. Weldon , Shamouil Shamouilian , Jon T. Clinton , Surinder S. Bedi
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： B23Q3/15
- IPC分类号： B23Q3/15 ; H01L21/683 ; H02N13/00
摘要：
A puncture resistant electrostatic chuck (20) is described. The chuck (20) comprises at least one electrode (25); and a composite insulator (30) covering the electrode. The composite insulator comprises a matrix material having a conformal holding surface (50) capable of conforming to the substrate (35) under application of an electrostatic force generated by the electrode to reduce leakage of heat transfer fluid held between the substrate and the holding surface. A hard puncture resistant layer, such a layer of fibers or an aromatic polyamide layer, is positioned below the holding surface (50) and is sufficiently hard to increase the puncture resistance of the composite insulator.
公开/授权文献
- USD355148S Electric tractor vehicle 公开/授权日：1995-02-07
信息查询
IPC分类:
