A chemical process apparatus component comprising a high purity, corrosion resistant composite including a continuous carbon fiber reinforced carbon matrix having a level of total metal impurity below about 10 ppm, preferably below about 5 ppm. Most preferably, the composite has a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy for the metals Ag, Al, Ba, Be, Ca, Cd, Co, Cr, Cu, K, Mg, Mn, Mo, Na, Ni, P, Pb, Sr and Zn. A process utilizing at least one of the above components for use in a chemical process apparatus, wherein said component is in contact with at least one of i) a high purity material, such as for processing, and ii) a corrosive process media.