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US5991088A Illumination system and exposure apparatus 失效
照明系统和曝光装置

Illumination system and exposure apparatus
摘要:
An illumination system includes a light source and an optical system for projecting light from the light source to a surface to be illuminated, wherein the optical system includes an optical element having a paraxial power of substantially zero and having an aspherical surface, and the optical element is movable along an optical axis when an illuminance distribution on the surface to be illuminated is to be changed.
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