发明授权
US5994796A Single-pole single-throw microelectro mechanical switch with active off-state control 有权
具有主动关态控制的单刀单掷微电机械开关

Single-pole single-throw microelectro mechanical switch with active
off-state control
摘要:
A microelectromechanical switch having a beam cantilevered from a switch base, a first control electrode, having no path to ground, in contact with the fixed end of the cantilevered beam and a second control electrode, also having no path to ground, mounted to the switch base underneath the cantilevered beam, but not in contact therewith. A contact electrode is located underneath the free end of the cantilevered beam. The first and second control electrodes are manipulated to actively effect both the ON and OFF states of the microelectromechanical switch by forcing the beam in and out of contact with the contact electrode.
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