发明授权
- 专利标题： Wafer cassette conveying system
- 专利标题（中）： 晶圆盒输送系统
-
申请号： US791666申请日： 1997-01-30
-
公开(公告)号： US6000900A公开(公告)日： 1999-12-14
- 发明人: Teruo Isogai
- 申请人： Teruo Isogai
- 申请人地址： JPX Tateyama
- 专利权人： Nippon Steel Semiconductor Corporation
- 当前专利权人： Nippon Steel Semiconductor Corporation
- 当前专利权人地址： JPX Tateyama
- 优先权： JPX8-109638 19960430
- 主分类号： B65D85/38
- IPC分类号： B65D85/38 ; B65G49/07 ; H01L21/00 ; H01L21/673 ; H01L21/677 ; B65H5/00
摘要：
A wafer cassette conveying system is capable of reducing a communication amount between a conveying device and a control device, further shortening the time period required for a movement of the conveying device. A control device 15, when receiving both of a lot carrying-in request signal outputted from a first treating device 11 and an empty cassette carrying-out request signal outputted from a second treating device 12, outputs a lot carrying-in command signal. A conveying device 20, when receiving this lot carrying-in command signal, conveys an actual cassette of the first treating device 11 to the second treating device 12 and also conveys an empty cassette of the second treating device 12 to an empty cassette space 14.
公开/授权文献
- US5257237A SAM data selection on dual-ported DRAM devices 公开/授权日：1993-10-26
信息查询
IPC分类:
