发明授权
- 专利标题: Rigid thin windows for vacuum applications
- 专利标题(中): 用于真空应用的刚性薄窗户
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申请号: US684166申请日: 1996-07-19
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公开(公告)号: US6002202A公开(公告)日: 1999-12-14
- 发明人: Glenn Allyn Meyer , Dino R. Ciarlo , Booth Richard Myers , Hao-Lin Chen , George Wakalopulos
- 申请人: Glenn Allyn Meyer , Dino R. Ciarlo , Booth Richard Myers , Hao-Lin Chen , George Wakalopulos
- 申请人地址: CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: CA Oakland
- 主分类号: E03D5/10
- IPC分类号: E03D5/10 ; G01T7/00 ; H01J5/18 ; H01J33/04 ; H01L21/302 ; H01L27/14 ; H01J33/00 ; G21K1/00
摘要:
A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.