公开(公告)号：US6002202A

公开(公告)日：1999-12-14

申请号：US684166

申请日：1996-07-19

申请人： Glenn Allyn Meyer ,  Dino R. Ciarlo ,  Booth Richard Myers ,  Hao-Lin Chen ,  George Wakalopulos

发明人： Glenn Allyn Meyer ,  Dino R. Ciarlo ,  Booth Richard Myers ,  Hao-Lin Chen ,  George Wakalopulos

IPC分类号： E03D5/10 ,  G01T7/00 ,  H01J5/18 ,  H01J33/04 ,  H01L21/302 ,  H01L27/14 ,  H01J33/00 ,  G21K1/00

CPC分类号： H01J33/04

摘要： A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.

摘要翻译： 使用光刻和湿化学蚀刻技术制造脱离大气压的薄窗，并且包括至少两层：蚀刻停止层和保护性阻挡层。 窗户结构还包括一系列支撑肋，该肋支撑着窗户的宽度。 窗口通常由硼掺杂的硅和氮化硅制成，并且可用于诸如电子束枪和x射线检测器的仪器中。 在电子束枪中，窗口不会阻碍电子，并且在枪管制造过程中表现出出色的喷枪性能和生存能力。