发明授权
- 专利标题： Optical displacement measurement apparatus and information recording apparatus
- 专利标题（中）： 光位移测量装置和信息记录装置
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申请号： US897548申请日： 1997-07-21
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公开(公告)号： US6005667A公开(公告)日： 1999-12-21
- 发明人: Makoto Takamiya , Kou Ishizuka
- 申请人： Makoto Takamiya , Kou Ishizuka
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX8-193317 19960723; JPX8-248804 19960830
- 主分类号： G01D5/38
- IPC分类号： G01D5/38 ; G11B5/55 ; G11B5/596 ; G01B9/02
摘要：
This invention relates to an apparatus for optically measuring the relative displacement of an object with a diffraction grating, and the apparatus has a light projection system for spot-projecting a light beam onto the diffraction grating and light detection means for receiving an interference light beam obtained by multiplexing diffracted light beams of different orders from the spot projection position on the diffraction grating in a state in which the wavefronts of the diffracted light beams are matched with each other. The relative displacement of the object is measured upon light reception of the light detection means.
公开/授权文献
- US4708537A Metal cutting tool 公开/授权日：1987-11-24
信息查询
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