摘要:
An apparatus for detecting the displacement information of an object has a light source, a diffraction grating for diffracting a light beam from the light source so that the light beam diffracted by the diffraction grating is incident on the object, and a photodetector for detecting the light from the object caused upon the incidence of the light beam thereon by the diffraction grating. Information regarding the relative displacement to the object along a predetermined direction is detected on the basis of a light detection signal from the photodetector. The diffraction grating is formed so that the light beam applied to the object may be condensed on the object in a direction in which the relative displacement to the object cannot be detected by the signal from the photodetector.
摘要:
This invention relates to an apparatus for optically measuring the relative displacement of an object with a diffraction grating, and the apparatus has a light projection system for spot-projecting a light beam onto the diffraction grating and light detection means for receiving an interference light beam obtained by multiplexing diffracted light beams of different orders from the spot projection position on the diffraction grating in a state in which the wavefronts of the diffracted light beams are matched with each other. The relative displacement of the object is measured upon light reception of the light detection means.
摘要:
An apparatus having a first system for forming a composite light beam of two light beams to be made to interfere with each other, a splitting member for amplitude-splitting the composite light beam into three or more split light beams in the same area, and a second system for obtaining interference light beams of different phases from the plurality of split light beams. Also, an apparatus for effecting information recording on a hard disc drive device comprising an (i) optical system for splitting a light beam into two light beams, causing one of the two light beams to be condensed and reflected by the side of an arm for a recording reading head in the hard disc drive device, and superposing the condensed and reflected light beam on the other light beam to thereby obtain a composite light beam, (ii) a splitting member for amplitude-splitting the composite light beam into three or more split light beams in the same area, (iii) an optical member for obtaining interference light beams of different phases from the plurality of split light beams, (iv) light receiving elements for detecting respective ones of the interference light beams of different phases, (v) a control system for effecting the positioning of the arm on the basis of the result of the detection by each of the light receiving elements, and (vi) a signal writing-in system for writing a signal into a hard disc through the recording reading head each time the arm is positioned.
摘要:
An apparatus for detecting position change information of an object includes a contact member for contacting the object, and a detecting unit for obtaining position change information of the object by detecting a change in force applied from the object to the contact member.
摘要:
An optical type sensor has a light emitting element, a light receiving element, at least one optical element acting on a light beam emitted from the light emitting element, in an optical path till the light beam enters the light receiving element, and a spacer member disposed to define a spacing between the light emitting element and/or the light receiving element and the at least one optical element, the spacer member having a structure for being mounted to other member.
摘要:
A light beam emitted from a semiconductor-laser light source is projected onto a diffraction-grating scale after passing through a collimator lens, a beam splitter and a central portion of an annular reflection grating. Two diffracted light beams reflected from the diffraction-grating scale are projected onto the annular reflection grating. The annular reflection grating diffracts the light beams projected onto all portions thereon to a substantially original direction to be projected onto and diffracted from the same position on the diffraction-grating scale. The diffracted light beams are superposed and the resultant light beam is returned to the beam splitter. The light beam is guided by the beam splitter in a direction different from the semiconductor-laser light source, and is detected by a photosensor as an interference light beam. Even if the oscillation wavelength of the semiconductor-laser light source changes, for example, due to a change in the temperature environment, to change the diffraction angles of the diffracted light beams, the light beams are diffracted with original diffraction angles by the annular reflection grating, the position of rediffraction by the diffraction-grating scale and the state of emitted light beams are invariable. Hence, the state of interference is stable.
摘要:
Disclosed is an optical apparatus which can be used for measuring displacement of an object. The apparatus includes an optical system for forming a linearly polarized beam whose polarization direction changes, a reflecting surface for reflecting the beam and for directing the beam in a predetermined direction, a photoelectric converter for photoelectrically converting a reflected beam directed in the predetermined direction, a polarizing device, arranged in an optical path of the reflected beam, for directing only a P-polarized beam or an S-polarized beam of the reflected beam toward the photoelectric converter.
摘要:
A light beam emitted from a semiconductor-laser light source is projected onto a diffraction-grating scale after passing through a collimator lens, a beam splitter and a central portion of an annular reflection grating. Two diffracted light beams reflected from the diffraction-grating scale are projected onto the annular reflection grating. The annular reflection grating diffracts the light beams projected onto all portions thereon to a substantially original direction to be projected onto and diffracted from the same position on the diffraction-grating scale. The diffracted light beams are superposed and the resultant light beam is returned to the beam splitter. The light beam is guided by the beam splitter in a direction different from the semiconductor-laser light source, and is detected by a photosensor as an interference light beam. Even if the oscillation wavelength of the semiconductor-laser light source changes, for example, due to a change in the temperature environment, to change the diffraction angles of the diffracted light beams, the light beams are diffracted with original diffraction angles by the annular reflection grating, the position of rediffraction by the diffraction-grating scale and the state of emitted light beams are invariable. Hence, the state of interference is stable.
摘要:
An apparatus for detecting displacement information is disclosed. The apparatus is provided with a scale arranged on the side of an object of which relative displacement information is to be detected, a periodic signal generation diffraction grating formed at a predetermined pitch, and a predetermined data recording portion formed independently of the periodic signal generation and diffraction grating for detecting displacement information, a first detection system for irradiating a light beam onto the periodic signal generation diffraction grating to generate diffracted light, the first detection system forming a periodic signal corresponding to a displacement relative to the scale by detecting interference light of the diffracted light generated by the periodic signal generation diffraction grating, and a second detection system for optically detecting the predetermined data recording portion. The predetermined data recording portion also has a diffraction grating.
摘要:
A light beam emitted from a semiconductor-laser light source is projected onto a diffraction-grating scale after passing through a collimator lens, a beam splitter and a central portion of an annular reflection grating. Two diffracted light beams reflected from the diffraction-grating scale are projected onto the annular reflection grating. The annular reflection grating diffracts the light beams projected onto all portions thereon to a substantially original direction to be projected onto and diffracted from the same position on the diffraction-grating scale. The diffracted light beams are superposed and the resultant light beam is returned to the beam splitter. The light beam is guided by the beam splitter in a direction different from the semiconductor-laser light source, and is detected by a photosensor as an interference light beam. Even if the oscillation wavelength of the semiconductor-laser light source changes, for example, due to a change in the temperature environment, to change the diffraction angles of the diffracted light beams, the light beams are diffracted with original diffraction angles by the annular reflection grating, the position of rediffraction by the diffraction-grating scale and the state of emitted light beams are invariable. Hence, the state of interference is stable.