发明授权
- 专利标题: Inspection apparatus for semiconductor packages
- 专利标题(中): 半导体封装检测装置
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申请号: US56234申请日: 1998-04-07
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公开(公告)号: US6005965A公开(公告)日: 1999-12-21
- 发明人: Yukihiro Tsuda , Takashi Kurihara , Takahiro Ueda , Tomikazu Tanuki , Yasuyoshi Suzuki
- 申请人: Yukihiro Tsuda , Takashi Kurihara , Takahiro Ueda , Tomikazu Tanuki , Yasuyoshi Suzuki
- 申请人地址: JPX
- 专利权人: Komatsu Ltd.
- 当前专利权人: Komatsu Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX9-088237 19970407
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G06K9/00
摘要:
A semiconductor package inspection apparatus which varies the emission spectrum of an oblique imaging illumination and a plan view imaging illumination from each other, and which comprises a first filter which is provided on the optical path from a semiconductor package to an oblique imaging device, and which passes light from the oblique imaging illumination and blocks light from the plan view imaging illumination; a second filter which is provided on the optical path from a semiconductor package to the plan view imaging device, and which passes light from the plan view imaging illumination and blocks light from the oblique imaging illumination; and a control unit which simultaneously turns on the oblique imaging and plan view imaging illumination, and inspects terminals of the semiconductor package based on image data of the oblique imaging device and plan view imaging device.
公开/授权文献
- USD390867S Supply unit for supplying a developer for a copying machine 公开/授权日:1998-02-17
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