发明授权
- 专利标题: Micro swivel actuators and a procedure for the production of the same
- 专利标题(中): 微型旋转执行机构及其生产程序
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申请号: US983119申请日: 1998-07-20
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公开(公告)号: US6016217A公开(公告)日: 2000-01-18
- 发明人: Wolfram Dotzel , Thomas Gessner , Ramon Hahn , Christian Kaufmann , Heinz-Ulrich Lowe , Joachim Markert , Manfred Rauch , Udo Wollmann
- 申请人: Wolfram Dotzel , Thomas Gessner , Ramon Hahn , Christian Kaufmann , Heinz-Ulrich Lowe , Joachim Markert , Manfred Rauch , Udo Wollmann
- 申请人地址: DEX Chemnitz
- 专利权人: CMS Mikrosystene GmbH Chemnitz
- 当前专利权人: CMS Mikrosystene GmbH Chemnitz
- 当前专利权人地址: DEX Chemnitz
- 优先权: DEX19523886 19950630; DEX19547584 19951220
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
The invention refers to micro swivel actuators and a procedure for the manufacturing of the same. The micro swivel actuators consist basically of a semiconductor wafer equipped with three layers, which contains on the one hand individual mirrors with integrated springs and support elements as mechanical components and on the other hand electrodes, feeder lines and electrical contacts as electrical arrangements. The manufacturing of the micro swivel actuators utilizes procedure steps from the field of surface micromechanics, so that well-tried technologies are being applied. The micro swivel actuators, especially the micromechanical mirror arrays, are in particular suited for applications in the pictorial reproduction technique via laser beam. With these actuators, a laser beam can be directed by turning several parallel triggered individual mirrors.