发明授权
- 专利标题: Solid state extension method
- 专利标题(中): 固态扩展方法
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申请号: US979382申请日: 1997-11-26
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公开(公告)号: US6017682A公开(公告)日: 2000-01-25
- 发明人: Marie Angelopoulos , Claudius Feger , Jeffrey Donald Gelorme , Jane Margaret Shaw
- 申请人: Marie Angelopoulos , Claudius Feger , Jeffrey Donald Gelorme , Jane Margaret Shaw
- 申请人地址: NY Armonk
- 专利权人: Internatonal Business Machines Corporation
- 当前专利权人: Internatonal Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/038 ; G03F7/40
摘要:
A solid state chain extension method provides for the formation of a solid state film comprised of a high molecular weight polymer by chain extending a deblocked Lewis base with Lewis acid oligomers while the reactants are in a solid state form. In one embodiment, a negative resist is prepared by selectively exposing regions of the solid state film. The Lewis base is deblocked at the exposed regions by a suitable deblocking means. The Lewis acid oligomers and the deblocked Lewis base chain extend at the exposed regions. Development of the film removes the non-polymerized reactants. Optionally, the Lewis acid oligomers, when radiation-cross-linking, are cross-linked with one another prior to deblocking the Lewis base to form a negative resist. The cross-linked oligomers polymerize with the subsequently deblocked base to provide a high molecular weight polymer film. In an alternative embodiment, a positive resist is used by degrading and removing photo-sensitive Lewis acid oligomers using selective exposure lithography techniques and, subsequently, deblocking the Lewis base and chain extending the remaining oligomers with the deblocked Lewis base at the unexposed regions.
公开/授权文献
- US5245486A Disk unit with a side mounted board 公开/授权日:1993-09-14
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