发明授权
- 专利标题： Method of forming micro-sensor thin-film anemometer
- 专利标题（中）： 形成微传感器薄膜风速计的方法
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申请号： US698559申请日： 1996-08-15
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公开(公告)号： US6018861A公开(公告)日： 2000-02-01
- 发明人: Mark Sheplak , Catherine B. McGinley , Eric F. Spina , Ralph M. Stephens , Purnell Hopson, Jr. , Vincent B. Cruz
- 申请人： Mark Sheplak , Catherine B. McGinley , Eric F. Spina , Ralph M. Stephens , Purnell Hopson, Jr. , Vincent B. Cruz
- 申请人地址： DC Washington
- 专利权人： The United States of America as represented by the United States National Aeronautics and Space Administration
- 当前专利权人： The United States of America as represented by the United States National Aeronautics and Space Administration
- 当前专利权人地址： DC Washington
- 主分类号： G01F1/692
- IPC分类号： G01F1/692 ; G01P5/12 ; G01R3/00
摘要：
A device for measuring turbulence in high-speed flows is provided which includes a micro-sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14.degree. half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique.
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