发明授权
- 专利标题: Method and apparatus for the oriented solidification of molten silicon to form an ingot in a bottomless crystallization chamber
- 专利标题(中): 用于在无底结晶室中熔融硅定向固化以形成锭的方法和装置
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申请号: US799133申请日: 1997-02-13
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公开(公告)号: US6027563A公开(公告)日: 2000-02-22
- 发明人: Alok Choudhury , Matthias Blum , Harald Scholz , Georg Jarczyk
- 申请人: Alok Choudhury , Matthias Blum , Harald Scholz , Georg Jarczyk
- 申请人地址: DEX
- 专利权人: Ald Vacuum Technologies GmbH
- 当前专利权人: Ald Vacuum Technologies GmbH
- 当前专利权人地址: DEX
- 优先权: DEX19607098 19960224
- 主分类号: C30B11/14
- IPC分类号: C30B11/14 ; C30B11/00 ; C30B29/06 ; H01L21/208 ; H01L31/18 ; C30B15/20
摘要:
For the oriented solidification of molten silicon to form an ingot in a bottomless crystallization chamber (9, 41) with a cooling body (11), which can be lowered relative to the chamber, the flat bottom surface of a seed body (25) of solid silicon is laid on the surface of the cooling body. The top surface of the seed body (25) is melted, and the ingot is grown on top of it as the cooling body is lowered by relative motion with respect to the crystallization chamber (9, 41) at a rate which is dependent on the supply of additional silicon and the solidification rate. For the purpose of producing large ingots with a coarsely crystalline to monocrystalline structure, a seed body (25) with a crystalline structure selected from the group ranging from coarsely crystalline to monocrystalline is used. Either lump silicon is placed on top of the seed body (25) and melted by induction, or molten silicon is produced in a forehearth (37) and poured onto the seed body (25). The seed body (25) has a thickness of 0.3-20 mm, and preferably of 1-10 mm.
公开/授权文献
- US5192816A Pipe inner surface coating composition 公开/授权日:1993-03-09
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