发明授权
US6028301A Method for controlling a micro electro-mechanical systems and verifying the state thereof using light 失效
用于控制微电子机械系统并使用光验证其状态的方法

Method for controlling a micro electro-mechanical systems and verifying
the state thereof using light
摘要:
The present invention discloses a method for controlling a micro electro-mechanical system manufactured using micro-machining technology and verifying the state thereof and, more particularly, to a method for controlling the micro electro-mechanical system and verifying the state thereof using light so that the voltage applied to each MEMS is determined by the intensity of the light incident on two optical windows of the symmetric SEEDs respectively by attaching the symmetric SEEDs every MEMS to electrically connect one of the SEEDs to the MEMS in parallel, instead of a conventional method in which the voltage from the control circuit is applied directly to the MEMS via wires.
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