发明授权
- 专利标题: Method for controlling a micro electro-mechanical systems and verifying the state thereof using light
- 专利标题(中): 用于控制微电子机械系统并使用光验证其状态的方法
-
申请号: US968250申请日: 1997-11-12
-
公开(公告)号: US6028301A公开(公告)日: 2000-02-22
- 发明人: Kwang Joon Kim , Jong Hyun Lee
- 申请人: Kwang Joon Kim , Jong Hyun Lee
- 申请人地址: KRX Daejon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KRX Daejon
- 优先权: KRX96-65754 19961214
- 主分类号: G01R31/00
- IPC分类号: G01R31/00 ; B81B7/00 ; B81B7/02 ; H01J40/14
摘要:
The present invention discloses a method for controlling a micro electro-mechanical system manufactured using micro-machining technology and verifying the state thereof and, more particularly, to a method for controlling the micro electro-mechanical system and verifying the state thereof using light so that the voltage applied to each MEMS is determined by the intensity of the light incident on two optical windows of the symmetric SEEDs respectively by attaching the symmetric SEEDs every MEMS to electrically connect one of the SEEDs to the MEMS in parallel, instead of a conventional method in which the voltage from the control circuit is applied directly to the MEMS via wires.
公开/授权文献
- US6150823A Battery charge detecting variable loads 公开/授权日:2000-11-21
信息查询