发明授权
- 专利标题: Dual cantilever scanning probe microscope
- 专利标题(中): 双悬臂扫描探针显微镜
-
申请号: US47239申请日: 1998-03-25
-
公开(公告)号: US06028305A公开(公告)日: 2000-02-22
- 发明人: Stephen C. Minne , Calvin F. Quate
- 申请人: Stephen C. Minne , Calvin F. Quate
- 申请人地址: CA Stanford
- 专利权人: Board of Trustees of the Leland Stanford Jr. University
- 当前专利权人: Board of Trustees of the Leland Stanford Jr. University
- 当前专利权人地址: CA Stanford
- 主分类号: G01Q10/06
- IPC分类号: G01Q10/06 ; G01Q20/04 ; G01Q30/02 ; G01Q60/36 ; G01Q70/04 ; G01Q70/10 ; H01J3/14
摘要:
This microscope apparatus comprises two probes. The first probe is configured to interact with and measure characteristics of surfaces within an effective measurement distance of the first probe. This probe could be contact type, non-contact type, constant force mode, or constant height mode. A combination of actuation devices positions the first probe over a surface of a sample. The surface is scanned at high speeds in search of a target area. When a target area is found, a scanner moves the sample so that a second contact type probe with a sharp tip is positioned over the target area. The second probe is activated and the target area is scanned at low speeds and high resolution. The first and second probes are part of the same probe assembly. The probe assembly of the present invention does not require probe replacement as frequently as current assemblies because the sharp tip is used only at low speeds and high resolution configurations. Thus, the sharp tip wears slower than it would if the sharp tip was used to find the target feature as well.
公开/授权文献
- USD382099S Side element of an upper 公开/授权日:1997-08-12
信息查询