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    Atomic force microscope using a torsional harmonic cantilever
    1.
    发明授权
    Atomic force microscope using a torsional harmonic cantilever 有权
    原子力显微镜使用扭转谐波悬臂

    公开(公告)号：US07404314B2

    公开(公告)日：2008-07-29

    申请号：US11877353

    申请日：2007-10-23

    申请人： Ozgur Sahin ,  Calvin F. Quate ,  Olav Solgaard

    发明人： Ozgur Sahin ,  Calvin F. Quate ,  Olav Solgaard

    IPC分类号： G01B5/28 ,  G01N13/16 ,  G12B21/08 ,  G12B21/22

    CPC分类号： G01Q60/38 ,  G01Q60/34

    摘要： An atomic force microscope based apparatus for examining a sample includes a cantilever having a cantilever arm and a probe tip where the probe tip is offset laterally from a longitudinal axis of torsion of the cantilever arm, an oscillator that drives the cantilever into oscillation in a flexural mode to cause the probe tip to repeatedly interact with the sample where the tip-sample interaction of the laterally offset probe tip excites torsional motion of the cantilever, and a detection system that detects torsional motion of the cantilever in response to the tip-sample interaction.

    摘要翻译： 用于检查样品的基于原子力显微镜的装置包括悬臂，其具有悬臂和探针尖端，探针尖端从悬臂的扭转纵向轴向横向偏移，振荡器将悬臂驱动成弯曲的振荡 模式，使得探针尖端与样品重复相互作用，其中横向偏移探针尖端的尖端 - 样品相互作用激发悬臂的扭转运动，以及检测系统，其响应于尖端 - 样品相互作用检测悬臂的扭转运动 。

    Method of performing lithography using cantilever array
    4.
    发明授权
    Method of performing lithography using cantilever array 失效
    使用悬臂阵列进行光刻的方法

    公开(公告)号：US5666190A

    公开(公告)日：1997-09-09

    申请号：US566621

    申请日：1995-12-04

    申请人： Calvin F. Quate ,  Stephen Charles Minne

    发明人： Calvin F. Quate ,  Stephen Charles Minne

    IPC分类号： B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  G01Q20/02 ,  G01Q80/00 ,  G03F1/00 ,  G03F7/20 ,  H01J37/30 ,  G01P15/125 ,  G01B5/28 ,  H01J37/00

    CPC分类号： G01Q70/06 ,  B82Y10/00 ,  B82Y35/00 ,  B82Y40/00 ,  G01Q20/02 ,  G03F7/0002 ,  G03F7/2049 ,  G03F7/70358 ,  G03F7/70375 ,  G01Q80/00 ,  Y10S977/856 ,  Y10S977/857

    摘要： A lithography system includes a plurality of cantilevers, preferably formed in a silicon wafer. Each cantilever includes a tip located near the free end of the cantilever and an electrical conduction path which extends along the length of the cantilever to the tip. A switch is included in the conduction path to control the voltage at the tip of the cantilever.The array of such cantilevers is positioned adjacent a wafer which is to be patterned, in the manner of an atomic force microscope operating in either the contact or noncontact mode. The cantilever array is scanned over the wafer, preferably in a raster pattern, and the individual switches are operated so as to control an electric current or electric field at the tip of each cantilever. The electric current or field is used to write a pattern on a layer of resist coating the wafer or on the surface of the wafer itself. Alternatively, the lithographic pattern may be formed by using the tip to scribe lines in a thin layer of soft material coating the wafer.

    摘要翻译： 光刻系统包括多个悬臂，优选地形成在硅晶片中。 每个悬臂包括位于悬臂的自由端附近的尖端以及沿着悬臂的长度延伸到尖端的电传导路径。 传导路径中包含开关以控制悬臂尖端的电压。 这种悬臂的阵列以原子力显微镜以接触或非接触模式操作的方式定位在待图案化的晶片附近。 悬臂阵列优选以光栅图案扫描在晶片上，各个开关被操作以便控制每个悬臂尖端处的电流或电场。 电流或场用于将图案写在涂覆晶片或晶片本身表面的抗蚀剂层上。 或者，可以通过使用尖端在涂覆晶片的薄材料薄层中划线来形成平版印刷图案。

    Fluid application device and method of operation
    5.
    发明授权
    Fluid application device and method of operation 失效
    流体应用装置及操作方法

    公开(公告)号：US5608433A

    公开(公告)日：1997-03-04

    申请号：US294059

    申请日：1994-08-25

    申请人： Calvin F. Quate

    发明人： Calvin F. Quate

    IPC分类号： B41J2/015 ,  B41J2/14 ,  B41J19/14 ,  B41J23/14

    CPC分类号： B41J2/14008 ,  B41J19/142

    摘要： A fluid application device and method transfers fluid to a substrate from a fluid applicator having a plurality of ejectors. The substrate is partitioned into a matrix of cells covering the substrate and each cell includes a plurality of fluid-receiving sites. Each of the ejectors on the fluid applicator is associated with a respective one of the cells on the substrate. As fluid is ejected from the ejectors of the fluid applicator toward the substrate, the fluid applicator and substrate are moved relative to each other to cause the ejectors to scan back and forth across all of the fluid-receiving sites of each cell of the substrate. In a typical application, the fluid applicator is a printhead that ejects ink droplets toward a sheet, the printhead being approximately as large as the sheet.

    摘要翻译： 流体施加装置和方法将流体从具有多个喷射器的流体施加器传送到基底。 衬底被划分成覆盖衬底的电池的基质，并且每个电池包括多个流体接收部位。 流体施加器上的每个喷射器与基板上相应的一个单元相关联。 当流体从流体施用器的喷射器朝向基板喷射时，流体施加器和基板相对于彼此移动，以使喷射器在基板的每个单元的所有流体接收位置之间来回扫描。 在典型的应用中，流体施加器是将墨滴喷射到片材上的打印头，打印头大致与片材一样大。

    Near field acoustic ultrasonic microscope system and method
    7.
    发明授权
    Near field acoustic ultrasonic microscope system and method 失效
    近场声超声显微镜系统及方法

    公开(公告)号：US5319977A

    公开(公告)日：1994-06-14

    申请号：US718234

    申请日：1991-06-20

    申请人： Calvin F. Quate ,  Butrus T. Khuri-Yakub ,  Shinya Akamine ,  Babur B. Hadimioglu

    发明人： Calvin F. Quate ,  Butrus T. Khuri-Yakub ,  Shinya Akamine ,  Babur B. Hadimioglu

    IPC分类号： G01B17/00 ,  G01N29/06 ,  G01N29/24 ,  G01N37/00 ,  G01Q10/00 ,  G01Q20/00 ,  G01Q60/04 ,  G01Q60/06 ,  G01Q60/22 ,  G01S15/89 ,  G01N29/08

    CPC分类号： G01N29/0681 ,  G01H3/125 ,  G01Q60/32 ,  G01S15/8945 ,  G01N2291/02827 ,  G01N2291/048 ,  Y10S977/86

    摘要： An acoustic microscope assembly for atomic level inspection of a target object includes a cantilever arm with a sharp tip on its lower surface and a zinc oxide piezoelectric thin film on its upper surface. High frequency excitation signals, having a frequency of at least 50 Megahertz, are applied to the piezoelectric thin film so as to generate high frequency acoustic signals that are transmitted through the sharp tip so as to impact on a target object. The assembly can either receive acoustic signals reflected by the target object, or it can receive acoustic signals that have propagated through the target object. One method of using this assembly is to apply a continuous wave signal to the piezoelectric thin film while scanning the target object, and measuring characteristics of the target object at various positions thereof by measuring the resonant frequency of the transmitted high frequency acoustic signals. Other methods include pulsed operation, and combining acoustic measurements with atomic force measurements and/or tunneling current measurements to characterize a target object. The acoustic microscope assembly can also be used for storing information on a substrate, by deforming the substrate at selected positions, and for reading such stored information by determining which positions on a substrate have been deformed.

    摘要翻译： 用于目标物体的原子级检查的声学显微镜组件包括在其下表面具有尖锐尖端的悬臂和在其上表面上的氧化锌压电薄膜。 将具有至少50兆赫兹频率的高频激励信号施加到压电薄膜上，以便产生通过尖尖传输以便对目标物体产生影响的高频声信号。 组件可以接收由目标对象反射的声信号，或者它可以接收已传播通过目标对象的声信号。 使用该组件的一种方法是在扫描目标物体的同时向压电薄膜施加连续波信号，并且通过测量发射的高频声信号的谐振频率来测量其各个位置处的目标物体的特性。 其他方法包括脉冲操作，以及将声学测量与原子力测量和/或隧道电流测量结合以表征目标对象。 声学显微镜组件还可以用于在基板上存储信息，通过使基板在选定位置变形，并且通过确定基板上的哪些位置已经变形来读取这些存储的信息。

    Traveling wave ink jet printer with drop-on-demand droplets
    8.
    发明授权
    Traveling wave ink jet printer with drop-on-demand droplets 失效
    旅行波形喷墨打印机具有按需滴下的液滴

    公开(公告)号：US5305016A

    公开(公告)日：1994-04-19

    申请号：US801978

    申请日：1991-12-03

    申请人： Calvin F. Quate

    发明人： Calvin F. Quate

    IPC分类号： B41J2/015 ,  B41J2/065 ,  G01D15/16

    CPC分类号： B41J2/065

    摘要： A traveling wave droplet generator having a drop-on-demand mode of operation. An acoustic mechanism excites a line of peaks of ink just below threshold for ink drop ejection in the orifices of an ink chamber. Electrostatic means raises particular peaks above the threshold using an excitation that is synchronous with the acoustic wave, which gives rise to parametric coupling which enhances the efficiency of the ejection. The electrostatic field can be selectively established at each of the orifices by a conventional addressing mechanism.

    摘要翻译： 具有按需按需操作模式的行波小滴发生器。 声学机构激发墨水的峰值线刚好低于阈值，用于在墨水室的孔口中的墨滴喷射。 静电装置使用与声波同步的激发提高高于阈值的特定峰值，这引起参数耦合，这提高了喷射的效率。 可以通过常规寻址机构在每个孔口选择性地建立静电场。

    Nitride cantilevers with single crystal silicon tips
    9.
    发明授权
    Nitride cantilevers with single crystal silicon tips 失效

    公开(公告)号：US5066358A

    公开(公告)日：1991-11-19

    申请号：US427788

    申请日：1988-10-27

    申请人： Calvin F. Quate ,  Marco Tortonese

    发明人： Calvin F. Quate ,  Marco Tortonese

    IPC分类号： G01B5/28 ,  G01B21/30 ,  G01Q10/00 ,  H01L21/306

    CPC分类号： G01Q70/16 ,  B82Y35/00 ,  G01Q70/14

    摘要： A nitride cantilever is formed with an integral conical silicon tip at the free end thereof. A top layer of silicon dioxide is patterned into a tip mask on a doped or epitaxial silicon layer in a silicon substrate. Photoresist is spun on the silicon substrate and patterned and the silicon is etched to define a cantilever pattern in the substrate with the tip mask positioned to be near the free end of a nitride cantilever to be subsequently formed. A bottom layer of silicon dioxide is formed on the silicon substrate and then patterned and etched to define a masking aperture on the bottom silicon dioxide layer. The bottom of the silicon substrate is anisotropically etched through the masking aperture and the etch stops at the doped silicon layer. Alternatively, electrochemical etching is done by applying an electric potential across the P-N junction between the doped silicon layer and the appropriately-doped substrate. This releases the free end of the doped silicon layer from the silicon substrate. The anisotropic etch preferentially etches all of the crystal planes of the silicon substrate except the (111) planes to leave a silicon base from which extends the silicon surface layer as a cantilever. A nitride layer is then formed on the silicon substrate and dry etched from the top surface of the doped silicon surface layer to form a nitride cantilever on the bottom of the silicon substrate. The doped silicon layer is etched away while the tip mask helps to form a pointed silicon tip near the free end of the nitride cantilever.A microfabricated cantilever includes a (100) silicon base having a (111) oblique side. A nitride layer is formed over the (111) oblique side of the silicon base and extends outwardly from the top surface of the silicon base to form a nitride cantilever having one end fixed to the silicon base and having a free end. On the free end is fixed a single-crystal sharp conical silicon tip which extends upwardly.

    Hot melt ink acoustic printing
    10.
    发明授权
    Hot melt ink acoustic printing 失效
    热熔墨水声学印刷

    公开(公告)号：US4745419A

    公开(公告)日：1988-05-17

    申请号：US57184

    申请日：1987-06-02

    申请人： Calvin F. Quate ,  Scott A. Elrod

    发明人： Calvin F. Quate ,  Scott A. Elrod

    IPC分类号： B41J2/175 ,  B41J2/015 ,  B41J2/045 ,  B41J2/05 ,  B41J2/055 ,  B41J2/14 ,  B41J2/33 ,  G01D15/16

    CPC分类号： B41J2/14008 ,  B41J2/14161 ,  B41J2/33

    摘要： To facilitate the use of hot melt inks in acoustic ink printers of the type having a printhead including one or more acoustic droplet ejectors for supplying focused acoustic beams, such a printer comprises a carrier for transporting a generally uniformly thick film of hot melt ink across its printhead, together with a heating means for liquefying the ink as it nears the printhead. The droplet ejector or ejectors are acoustically coupled to the ink via the carrier, and their output focal plane is essentially coplanar with the free surface of the liquefied ink, thereby enabling them to eject individual droplets of ink therefrom on command. The ink, on the other hand, is moved across the printhead at a sufficiently high rate to maintain the free surface which it presents to the printhead at a substantially constant level. A variety of carriers may be employed, including thin plastic and metallic belts and webs, and the free surface of the ink may be completely exposed or it may be partially covered by a mesh or perforated layer. A separate heating element may be provided for liquefying the ink, or the lower surface of the carrier may be coated with a thin layer of electrically resistive material for liquefying the ink by localized resistive heating.

    摘要翻译： 为了便于在具有打印头的类型的声学墨水打印机中使用热熔油墨，该打印头包括用于提供聚焦声束的一个或多个声学液滴喷射器，这种打印机包括用于将大致均匀厚的热熔油墨膜横过其传送的载体 打印头，以及用于当墨水靠近打印头时液化油墨的加热装置。 液滴喷射器或喷射器通过载体与油墨声学耦合，并且它们的输出焦平面基本上与液化油墨的自由表面共面，从而使得它们能够按照命令喷射各自的墨滴。 另一方面，油墨以足够高的速率移动穿过打印头，以保持其以基本上恒定的水平呈现给打印头的自由表面。 可以使用各种载体，包括薄塑料和金属带和网，并且油墨的自由表面可以完全暴露，或者可以被网孔或穿孔层部分地覆盖。 可以提供单独的加热元件用于液化墨水，或者载体的下表面可以涂覆有用于通过局部电阻加热来液化墨水的电阻材料的薄层。