发明授权
- 专利标题: High pulse rate pulse power system with resonant power supply
- 专利标题(中): 高脉冲脉冲电源系统具有谐振电源
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申请号: US211825申请日: 1998-12-15
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公开(公告)号: US6028872A公开(公告)日: 2000-02-22
- 发明人: William N. Partlo , Daniel L. Birx , Richard M. Ness , Daniel A. Rothweil , Paul C. Melcher , Brett D. Smith
- 申请人: William N. Partlo , Daniel L. Birx , Richard M. Ness , Daniel A. Rothweil , Paul C. Melcher , Brett D. Smith
- 申请人地址: CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: CA San Diego
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H01S3/02 ; H01S3/03 ; H01S3/036 ; H01S3/097 ; H01S3/0971 ; H01S3/225 ; H02M9/02 ; H03K3/57 ; H03K17/80 ; H01S3/00
摘要:
A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated resonant power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
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